Power Distribution Board Interlock for Safe Substrate Equipment Inspection
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Solution Overview
Problem
In semiconductor manufacturing, substrate processing facilities pose a risk of electric shock to operators due to live electrical connections when inspecting process chambers or power supply systems, often resulting from confusion or incorrect operation of branch circuit breakers.
Innovation Solution
A substrate processing equipment and method that automatically cuts off power to main and branch circuit breakers when the power distribution board door is opened, using a door open/close detection unit to switch the main circuit breaker to a turn-off state, preventing accidental activation and ensuring operator safety.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the power distribution board door is opened for inspection, then the operator can access and inspect the process chamber or power supply system, but the electrical connection to the main circuit breaker remains live causing electric shock risk
Solution Approach 1:
The system applies preliminary anti-action by automatically detecting when the power distribution board door is opened and proactively cutting off power to the main circuit breaker before the operator can accidentally contact live electrical components. The door open/close detection unit triggers the shunt unit to open the main circuit breaker, preventing the harmful electric shock effect before it can occur.
Solution Approach 2:
The shunt unit acts as an intermediary between the door open/close detection unit and the main circuit breaker. When the door is opened, the detection unit signals the shunt unit, which then mediates by cutting off power to the main circuit breaker, creating a safety buffer between the operator and the hazardous electrical system.
2Productivity
If the main circuit breaker remains electrically connected during inspection, then power can be quickly restored after inspection, but the operator is exposed to live wire state causing electric shock hazard
Solution Approach 1:
The system preemptively cuts off power to the main circuit breaker when the door is opened, eliminating the electric shock hazard before inspection begins. After inspection, when the door is closed, the system automatically restores power, achieving both safety during inspection and quick restoration afterward.
Solution Approach 2:
The system dynamically changes the power state of the main circuit breaker based on the door status. When the door is open, power is cut off; when the door is closed, power is restored. This dynamic adaptation allows the system to maintain operator safety during inspection while enabling quick power restoration afterward.
3Ease of operation
If manual power cutoff procedures are used, then operators can control power supply, but confusion or lack of familiarity leads to incorrect operation of branch circuit breakers
Solution Approach 1:
The system performs the power cutoff and restoration operations automatically without requiring operator intervention. The door open/close detection unit and shunt unit work together to self-manage the power state of the main circuit breaker based on door status, eliminating human error entirely.
Solution Approach 2:
The door open/close detection unit provides continuous feedback about the door status to the shunt unit, which automatically adjusts the main circuit breaker state accordingly. This feedback mechanism ensures that power is always in the correct state relative to door position, eliminating confusion and incorrect operation.
Data Source
AI summary
Disclosed are a substrate processing equipment and a method of driving the substrate processing equipment, which automatically cut off power supplied to a main circuit breaker and a branch circuit breaker when an operator inspects a process chamber or a power supply system. The substrate processing equipment for processing a substrate includes: a process processing module including loads utilized in a process for processing a substrate; a branch circuit breaker installed on a periphery to the process processing module and electrically connected to the loads; a main circuit breaker electrically connected to the branch circuit breaker and supplying power to the branch circuit breaker; and a power distribution board in which the branch circuit breaker is mounted, and including a power distribution board door, in which the main circuit breaker cuts off power when the power distribution board door is opened.