Power Combiner Using Reflection Part to Suppress Higher Order Modes
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Solution Overview
Problem
Conventional power combiners for microwave plasma processing face challenges in miniaturization and efficient high-power microwave combination due to the generation of higher order modes and heat loss from reflection absorption resistors, limiting their ability to supply sufficient power efficiently.
Innovation Solution
A power combiner with a coaxial structure and a power combining antenna that uses a ring-shaped reflection part to form standing waves, eliminating the need for internal reflection absorption resistors and optimizing the configuration to suppress higher order modes, allowing for efficient combination and output of high-power microwaves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a Wilkinson combiner is used for power combining, then power combining capability is achieved, but the combiner size increases due to the reflection absorption resistor
Solution Approach 1:
The patent extracts and removes the reflection absorption resistor from the combiner structure, replacing it with a reflective structure that achieves power combining without the bulky resistor component, thereby reducing combiner size while maintaining power combining capability
Solution Approach 2:
The patent replaces the resistive absorption mechanism with an electromagnetic reflection mechanism, using a reflective structure to combine power through standing wave formation rather than through resistive dissipation, achieving compact design
2Power
If a Wilkinson combiner with reflection absorption resistor is used, then power combining is achieved, but heat generation occurs reducing effective transmissible power
Solution Approach 1:
The patent converts the harmful heat generation effect into a beneficial standing wave formation mechanism, where the reflective structure creates constructive interference patterns that combine power efficiently without energy dissipation as heat
Solution Approach 2:
The patent substitutes the resistive dissipation mechanism with an electromagnetic reflection and interference mechanism, eliminating Joule heating losses while achieving the desired power combining effect through standing wave construction
3Power
If conventional power combiner configuration is used, then power combining is achieved, but higher order modes are generated degrading microwave propagation characteristics
Solution Approach 1:
The patent applies local quality optimization by carefully designing the spatial distribution and positioning of multiple antenna elements within the combiner, creating specific electromagnetic field patterns that favor fundamental mode propagation while suppressing higher order modes in localized regions
Solution Approach 2:
The patent uses optimized antenna element spacing and positioning that exceeds minimal requirements, creating strong fundamental mode fields that dominate and suppress higher order mode generation through excessive constructive interference in the desired mode
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a compact, high-efficiency power combiner that effectively combines microwaves with minimal power loss, achieving output levels comparable to or exceeding conventional systems while preventing heat generation and maintaining a TEM mode propagation.
Implementation Method 1
a power combining antenna configured to radiate electromagnetic waves which are supplied through the plurality of power introduction ports via the power supply lines, to a space between the outer conductor and the inner conductor of the main body such that the powers are combined
Implementation Method 2
a reflection part installed in a ring shape along an outer side of the inner conductor from both sides of each of the plurality of antenna members and configured to reflect the electromagnetic waves
Implementation Method 3
A standing wave is formed by the electromagnetic waves incident onto the plurality of antenna members and the electromagnetic waves reflected at the reflection part
Data Source
AI summary
A power combiner includes a main body composed of outer and inner conductors, a plurality of power introduction ports configured to introduce electromagnetic wave powers supplied through power supply lines into the main body, a power combining antenna configured to radiate electromagnetic waves to a space between the outer and inner conductors such that the powers are combined, and an output port through which the combined electromagnetic wave is outputted from the main body. The power combining antenna includes a plurality of antenna members, each of which has a first pole and a second pole that is in contact with the inner conductor, and a reflection part configured to reflect the electromagnetic waves.