Power Converter Logic Circuit for Plasma Power Synchronization
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Solution Overview
Problem
Power supply systems for plasma and gas laser processes face challenges in synchronizing and adjusting the phase and amplitude of power signals from multiple amplifiers, leading to difficulties in setting power and degree of ionization, especially with sudden changes like arcs in the plasma chamber.
Innovation Solution
A power supply system with a power converter that uses a digital-to-analog converter (DAC) to generate analog signals, which are then amplified, allowing for precise control and synchronization of amplifier paths through a logic circuit unit, signal data memory, and amplitude data memory, enabling quick and reliable power adjustment and ionization control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If multiple amplifiers are used to generate high-frequency power signals, then the overall power output is increased, but the phase synchronization and amplitude matching between amplifiers becomes difficult to achieve
Solution Approach 1:
The patent applies preliminary action by pre-storing calibration data in a memory device that compensates for phase and amplitude differences between multiple amplifiers. Before normal operation, the system performs calibration and stores the correction data, which is then automatically applied during operation to maintain precise synchronization without requiring real-time adjustment mechanisms.
2Productivity
If fixed phase relationships and amplitude matching are required for combining amplifier outputs, then the power combination efficiency is improved, but the system becomes difficult to adjust when sudden power changes are needed
Solution Approach 1:
The patent implements dynamics by making the phase and amplitude parameters adjustable and adaptable. The system uses stored calibration data that can be dynamically applied to different amplifier combinations, allowing the system to maintain optimal synchronization and matching while adapting to different power output requirements and sudden changes in operating conditions.
3Power
If analog signals are generated and amplified through multiple amplifier paths, then the power output is increased, but the control precision and speed for setting power and ionization degree becomes limited
Solution Approach 1:
The patent replaces traditional analog control mechanisms with a digital control system. A digital signal generator produces precise control signals that are converted to analog form only at the final stage, allowing for high-precision digital control of power and ionization degree while still achieving the required high power output through analog amplification.
4Device complexity
If traditional power supply systems are used for plasma and gas laser processes, then the system structure is simple, but the hardware requirements and costs increase when synchronization and precision control are needed
Solution Approach 1:
The patent implements a universal control architecture where a single digital signal generator and control system can manage multiple amplifier paths simultaneously. The stored calibration data can be applied to different combinations of amplifiers, making the system multi-functional and reducing the need for separate control hardware for each amplifier, thereby reducing overall hardware requirements and costs.
Data Source
AI summary
A power supply system (2, 20) having a power converter (3, 30) which produces a high frequency signal and which can be connected to a load (6) in order to supply a plasma or gas laser process with power, wherein said power converter has at least a first amplifier path (31), an audio signal generated by a DAC (41) from a digital signal being supplied to at least one amplifier path (31-36), is characterized in that a logic circuit unit (42) for generating the digital signal supplied to the DAC is provided upstream of the DAC, said logic circuit unit having - a signal data store (61) in which signal data values for generating an analog signal form are stored, - an amplitude data store (62) in which amplitude data values for influencing the amplitudes of the analog signals are stored, - a multiplier (63) for multiplying the signal data values with the amplitude data values. In a method for producing high frequency power that can be supplied to a load, in which an analog signal is produced by a DAC and amplified in an amplifier path (31-36), the amplitude of the analog signal is modulated.