Single Power Converter for Multi-Chamber Plasma Control

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Solution Overview

Problem

Plasma processing systems with multiple independent chambers face high installation costs due to excess power capacity from multiple power supplies, which is not fully utilized.

Innovation Solution

A power converter that converts electrical input power into bipolar output power and delivers it to multiple plasma processing chambers, allowing for differential control of power, voltage, current, excitation frequency, and threshold parameters to each chamber, enabling a single power converter to serve multiple chambers efficiently.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple independent power supplies are used for each plasma processing chamber, then each chamber can be controlled independently with appropriate power, but installation costs increase due to excess power capacity

Engineering Contradiction:

Improveindependent control capabilityVSAvoidnumber of power supplies

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines multiple independent power supplies into a single power converter that serves multiple plasma processing chambers. The power converter includes a controller that can independently control the power delivered to each chamber, effectively merging the functionality of multiple power supplies into one unit while maintaining independent control capability for each chamber.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The single power converter is designed to perform multiple functions by serving different plasma processing chambers with different power requirements. The controller can adaptively adjust power, voltage, current, and frequency parameters for each chamber, making the power converter a universal device that replaces multiple specialized power supplies.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Power

If multiple independent power supplies are installed for each chamber, then adequate power capacity is available, but installation cost increases due to unused excess power

Engineering Contradiction:

Improvepower capacityVSAvoidinstallation cost

Core Design Contradiction:

PowerVSEase of manufacture

Solution Approach 1:

The power converter employs dynamic control to adjust power distribution in real-time based on the actual needs of each plasma chamber. The controller can dynamically allocate power capacity among chambers, increasing power to chambers that need it and reducing or eliminating power to chambers that don't, thereby eliminating the need for excess installed power capacity and reducing installation costs.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The system changes operational parameters (power, voltage, current, frequency) dynamically based on chamber requirements. This parameter flexibility allows a single power converter with fixed maximum capacity to replace multiple power supplies with higher total capacity, reducing installation costs while maintaining adequate power delivery to each chamber when needed.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces installation costs by allowing a single power converter to efficiently manage power distribution across multiple chambers, optimizing power usage and reducing the need for multiple converters while maintaining control over plasma processes.

Implementation Method 1

a power converter, which is capable to convert an electrical input power into a bipolar output power

Methodology Applied

Scientific EffectElectrical power conversion:

Implementation Method 2

bipolar output power means an output power with an alternating current, where the current changes its direction with a frequency which may excite the plasma process (excitation frequency)

Methodology Applied

Scientific EffectBipolar alternating current:

Data Source

PatentUS11430642B2Controlling multiple plasma processes

Publication Date: 2022.08.30 TRUMPF HUETTINGER SP ZOO

AI summary

A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes a power input port for connection to an electrical power delivering grid, at least two power output ports each for connection to one of the plasma processing chambers, and a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using at least one of control parameters including power, voltage, current, excitation frequency, and threshold for protective measures. The controller includes a virtual power supply for each power output port, and each virtual power supply includes a separate complete set of all fixed and time varying parameters and internal states associated with the operation of the individual power output port.