Power Generation System Using Cooling Medium Temperature Control

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Solution Overview

Problem

Conventional power generation systems in semiconductor manufacturing factories fail to achieve sufficient power generation output, leading to inefficient energy utilization of waste heat.

Innovation Solution

A power generation system that utilizes cooling medium passages installed in heat sources to channel waste heat into a power generation part, with temperature and flow rate control mechanisms to ensure the cooling medium's temperature is equal to or higher than a predetermined level before entering the power generation part, optimizing power generation efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If cooling medium passages are installed in heat sources to channel waste heat into power generation part, then power generation output is improved, but temperature control difficulty increases

Engineering Contradiction:

Improvepower generation outputVSAvoidtemperature control difficulty

Core Design Contradiction:

PowerVSDevice complexity

Solution Approach 1:

The patent implements dynamic control of opening/closing parts in cooling medium passages to adjust the flow of cooling medium based on temperature conditions. This allows the system to adaptively optimize power generation output by controlling when and how cooling medium is channeled from heat sources to the power generation part, resolving the contradiction between maximizing power output and managing temperature control complexity.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The system changes the operational parameters of cooling medium flow by controlling opening/closing parts at different stages. By adjusting the flow rate and timing of cooling medium passage through the heat sources, the system optimizes the temperature and flow rate parameters entering the power generation part, thereby maximizing power generation while maintaining manageable control complexity.

Inventive Principle:

Principle #35Parameter changes

2Productivity

If cooling medium flow rate is increased to improve power generation efficiency, then power generation efficiency is improved, but energy loss increases

Engineering Contradiction:

Improvepower generation efficiencyVSAvoidenergy loss

Core Design Contradiction:

ProductivityVSLoss of energy

Solution Approach 1:

The patent applies partial action by controlling the cooling medium flow rate to be sufficient but not excessive. The opening/closing parts regulate the cooling medium flow to achieve the minimum necessary flow rate required for efficient power generation, avoiding the energy loss that would result from excessively high flow rates while still maintaining high power generation efficiency.

Inventive Principle:

Principle #16Partial or excessive action

Solution Approach 2:

The system uses temperature detection and control mechanisms that provide feedback on the cooling medium's temperature and flow rate. This feedback allows the control system to adjust the opening/closing parts to optimize the balance between power generation efficiency and energy loss, ensuring the cooling medium enters the power generation part at optimal parameters without excessive energy consumption.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach stabilizes power generation output by ensuring the cooling medium's temperature and flow rate meet specific criteria, enhancing power generation efficiency and enabling stable electric power supply.

Implementation Method 1

introducing a cooling medium for cooling a plurality of heat sources into a power generation part

Methodology Applied

Scientific EffectHeat conduction: Conduction (thermal)

Implementation Method 2

a plurality of cooling medium passages, through which the cooling medium for cooling the semiconductor manufacturing apparatuses flows

Methodology Applied

Scientific EffectConvection: Convection

Implementation Method 3

perform power generation by introducing a cooling medium for cooling a plurality of heat sources into a power generation part

Methodology Applied

Scientific EffectThermal energy conversion: Heat Engine

Data Source

PatentUS10690011B2Power generation system, management device, and semiconductor manufacturing apparatus

Publication Date: 2020.06.23 KOKUSAI DENKI KK

AI summary

There is provided a technique of a power generation system for performing power generation by introducing a cooling medium for cooling a plurality of semiconductor manufacturing apparatuses into a power generation part, wherein the system comprises a plurality of cooling medium passages, through which the cooling medium for cooling the semiconductor manufacturing apparatuses flows and connected to the power generation part. The system is configured to control an opening/closing part installed in each of the plurality of cooling medium passages based on a temperature of the cooling medium and to control inflow of the cooling medium from the plurality of cooling medium passages to the power generation part such that a temperature of the cooling medium flowing into the power generation part is equal to or higher than a predetermined temperature.