Semiconductor Power Cell Rails for Transistor Timing Tuning

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Solution Overview

Problem

Modifying the timing of transistors in semiconductor devices is challenging due to the difficulty in changing transistor channel length and dimensions without significant impacts on resistance, which affects transistor performance.

Innovation Solution

The solution involves arranging individual power delivery pillars into groups or power cells, connected in parallel to topside and bottom-side power delivery rails, allowing for adjustable resistance and easier circuit matching by modifying the number of power pillars connecting to transistors or circuit elements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If transistor channel length and dimensions are modified to adjust timing, then transistor timing performance is improved, but resistance changes significantly affecting device performance

Engineering Contradiction:
Improvetransistor timingVSAvoidresistance stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The power delivery network is segmented into multiple individual power pillars arranged in parallel between topside and bottom-side power delivery rails. This segmentation allows independent adjustment of each pillar's resistance characteristics while maintaining overall power delivery stability, enabling timing adjustment without significant resistance changes to the transistor channel.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements dynamic adjustability by varying the number of power pillars connected to different transistor groups or circuit elements. This dynamic configuration allows resistance to be adjusted on-demand to achieve precise timing control, while the parallel arrangement ensures that resistance changes are localized and do not significantly impact overall device performance.

Inventive Principle:
Principle #15Dynamics

2Adaptability or versatility

If individual power delivery pillars are arranged into groups or power cells, then resistance adjustability is improved, but device complexity increases

Engineering Contradiction:
Improveresistance adjustabilityVSAvoidpower cell structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The power cell structure serves multiple functions: it provides resistance adjustment, enables circuit matching, and maintains power delivery stability. By making the power delivery network multi-functional, the patent achieves resistance adjustability without proportionally increasing complexity, as the same structural elements perform multiple roles in the device.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent adjusts resistance by changing the number of power pillars in parallel rather than modifying the physical dimensions of individual pillars. This parameter change approach (varying quantity rather than geometry) simplifies the structural requirements compared to traditional methods that would require precise dimensional control of each pillar.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If the number of power pillars is modified to achieve circuit matching, then timing precision is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvetiming precisionVSAvoidpower pillar configuration
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

Power pillars are segmented into discrete, standardized units that can be selectively activated or deactivated. This segmentation allows manufacturing processes to use standard fabrication techniques for creating identical pillar units, then achieve precise timing control through selective connection during assembly or configuration, rather than requiring custom fabrication for each timing requirement.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent achieves circuit matching by changing the numerical parameter of power pillar count rather than modifying physical dimensions. This approach allows manufacturing to produce uniform power pillars using standard processes, then achieve precise timing adjustment through configurational changes (selecting different numbers of pillars) rather than requiring precision manufacturing of varying pillar geometries.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS11929360B2Power cell for semiconductor devices
Publication Date: 2024.03.12 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11929360B2 patent drawing
  • US11929360B2 patent drawing
  • US11929360B2 patent drawing

AI summary

A device includes an electrical circuit having a first set of circuit elements. The device further includes a first set of conductive pillars over a first side of a substrate. The device further includes a first conductive rail electrically connected to each of the first set of conductive pillars, wherein each of the first set of conductive pillars is electrically connected to each of the first set of circuit elements by the first conductive rail. The device further includes a first plurality of power pillars extending through the substrate, wherein each of the first plurality of power pillars is electrically connected to the first conductive rail.