Power Semiconductor Device Electrode Crack Prevention

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Solution Overview

Problem

Existing power semiconductor devices face issues with solder cracks due to differences in linear expansion coefficients between aluminum heat dissipation members and insulating substrates, leading to inadequate cooling and increased material costs, while metal sintered bodies can cause upper electrode cracks and complex manufacturing processes.

Innovation Solution

A power semiconductor device design featuring a semiconductor element bonded via a metal sintered body to an insulating substrate, with an aluminum cooler bonded via solder, and a protective film with an inclined surface on the upper electrode to prevent cracking, along with a lead bonded via solder to the upper electrode using a copper-Invar clad material to optimize linear expansion coefficients.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If solder is used to bond aluminum heat dissipation member to insulating substrate, then thermal conduction is improved and device weight is reduced, but solder cracks occur early due to large difference in linear expansion coefficient

Engineering Contradiction:
Improvethermal conduction efficiencyVSAvoidbonding durability
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent changes the material parameter of the insulating substrate by using a ceramic substrate with a linear expansion coefficient specifically selected to match that of aluminum (approximately 23×10^-6/℃). This parameter matching eliminates the expansion mismatch that causes solder cracking, while maintaining the thermal conduction benefits of solder bonding.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite structure where a ceramic substrate serves as the insulating base, combined with solder material for bonding. The ceramic material provides both electrical insulation and thermal conduction properties while its expansion coefficient is matched to aluminum, creating a composite system that resolves the contradiction between thermal performance and bonding reliability.

Inventive Principle:
Principle #40Composite materials

2Reliability

If copper pattern layer thickness is increased to match linear expansion coefficients, then solder crack is prevented, but difference in linear expansion coefficient between semiconductor element and insulating substrate increases causing electrode cracks

Engineering Contradiction:
Improvesolder bonding durabilityVSAvoidupper electrode integrity
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent changes the fundamental approach by selecting a ceramic substrate material whose linear expansion coefficient inherently matches both aluminum (for heat dissipation member bonding) and semiconductor elements. This eliminates the need to increase copper pattern thickness, thereby preventing both solder cracks and electrode cracks through proper material selection rather than structural modification.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If metal sintered body is used to bond semiconductor element to insulating substrate, then bonding reliability in high temperature operation is improved, but upper electrode cracks due to pressurization during bonding

Engineering Contradiction:
Improvehigh temperature bonding reliabilityVSAvoidupper electrode integrity
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent introduces a ceramic substrate as an intermediary component between the semiconductor element and the external environment. This ceramic substrate acts as a stable platform that distributes bonding pressure uniformly, preventing localized stress concentration that would crack the upper electrode, while still enabling reliable high-temperature operation through the metal sintered body bonding method.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Stability of the object's composition

If iron frame material is used to restrain aluminum heat dissipation member expansion, then thermal expansion is controlled, but manufacturing complexity and material cost increase due to multiple parts

Engineering Contradiction:
Improvethermal expansion controlVSAvoidnumber of components
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates the iron frame component entirely by integrating the thermal expansion control function directly into the ceramic substrate. The ceramic substrate's inherent linear expansion coefficient matching that of aluminum provides the restraining effect without requiring a separate frame structure, thereby reducing component count and manufacturing complexity while maintaining thermal expansion control.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design prevents upper electrode cracks, optimizes thermal management, reduces material costs, and enhances reliability for harsh environments by minimizing solder cracks and processing complexities, achieving durable and cost-effective power semiconductor devices.

Implementation Method 1

a power semiconductor device using a metal sintered body to bond a rear surface electrode of a semiconductor element and a wiring member

Methodology Applied
Scientific EffectSintering: Sintering

Implementation Method 2

a power semiconductor element is bonded via a solder to the upper surface of an insulating substrate, an aluminum heat dissipation member is bonded via a solder to the rear surface of the insulating substrate

Methodology Applied
Scientific EffectSoldering: Soldering

Implementation Method 3

an aluminum heat dissipation member is bonded via a solder to the rear surface of the insulating substrate

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 4

a protective film with an inclined surface on the upper electrode to prevent cracking

Methodology Applied
Scientific EffectStress distribution:

Implementation Method 5

a lead bonded via a solder to the upper electrode using a copper-Invar clad material to optimize linear expansion coefficients

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS10403559B2Power semiconductor device
Publication Date: 2019.09.03 MITSUBISHI ELECTRIC MOBILITY CORP
  • US10403559B2 patent drawing
  • US10403559B2 patent drawing
  • US10403559B2 patent drawing

AI summary

In a power semiconductor device, the thickness dimension of a protective film of a semiconductor element is made smaller than that of an upper electrode, so a protective film is not pressed by being pressurized from upward when bonded by a metal sintered body, and the force of tearing off the upper electrode riding on an inclined surface of the protective film does not act, so that no crack of the upper electrode occurs, thus maintaining the soundness of the semiconductor element. Also, a lead bonded by a solder to the upper electrode of the semiconductor element is made of a copper-Invar clad material, the linear expansion coefficient of which is optimized, and thereby it is possible to realize a durability superior to that of a heretofore known wire-bonded aluminum wiring.