Power-Supplying Member Thermal-Function Member Heat Dissipation
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Solution Overview
Problem
Conventional power-supplying members in heating apparatuses for semiconductor manufacturing systems, such as CVD systems, face issues with temperature differences leading to damage of O-rings and connectors due to inadequate heat management, resulting in arcing and compromised sealing in low-pressure environments.
Innovation Solution
A power-supplying member comprising a first rod-shaped member connected to the heating resistor or electrode, a second rod-shaped member connected to the power supply, and a thermal-function member with a smaller axial cross section area and larger surface area, which reduces longitudinal heat conduction and dissipates heat efficiently, thereby maintaining the O-ring and connector at a safe temperature.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the power-supplying member is used in low-pressure atmosphere, then the heating apparatus can operate in vacuum conditions, but the temperature of the power-supplying member does not drop significantly causing damage to the O-ring and connector
Solution Approach 1:
A heat-resistant coating layer is applied to the surface of the power-supplying member (first rod-shaped member) to act as an intermediary between the high-temperature heating zone and the low-temperature connector components. This coating layer has high heat resistance and low thermal conductivity, blocking heat transfer to the connector and O-ring while allowing the apparatus to operate in vacuum conditions.
Solution Approach 2:
The power-supplying member system uses composite structure combining the rod-shaped member (conductive material for power supply) with a heat-resistant coating layer (ceramic or oxide material). This composite structure provides both electrical conductivity for power supply and thermal insulation to protect the connector and O-ring from excessive heat in vacuum operation.
2Temperature
If heat-resistant materials are used for the connector and O-ring, then they can withstand higher temperatures, but the cost and complexity of the apparatus increases
Solution Approach 1:
The heat resistance function is extracted from the connector and O-ring materials themselves and transferred to a separate heat-resistant coating layer applied to the power-supplying member. This allows the connector and O-ring to use standard, simpler materials while the coating layer provides the necessary heat resistance, reducing overall system complexity and cost.
Solution Approach 2:
Heat resistance is applied locally only where needed - on the surface of the power-supplying member that is exposed to high temperatures. The connector and O-ring areas maintain their original material properties, avoiding the need for expensive heat-resistant materials throughout the entire power supply assembly, thus reducing complexity and cost.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces heat conduction to the second rod-shaped member, minimizing damage to the O-ring and connector, improving the durability of the heating apparatus and maintaining a hermetic seal even in low-pressure conditions.
Implementation Method 1
the thermal-function member can reduce longitudinal heat conduction
Implementation Method 2
dissipate heat to reduce heat conduction to the second rod-shaped member
Implementation Method 3
heat transfer of the gas around the power-supplying member, heat radiation to the supporting member, and the heat conduction to the cooling shaft
Data Source
AI summary
The power-supplying member comprises: a first rod-shaped member connected to at least one of a heating resistor and an electrode; a second rod-shaped member connected to a power supply; and a thermal-function member, which is disposed between the first rod-shaped member and the second rod-shaped member, and which has a smaller axial cross section area and a larger surface area as compared to the first and second rod-shaped members.