Prebaking device and prebaking system for display substrate
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Solution Overview
Problem
In the display substrate manufacturing process, solvent vapor accumulation during prebaking can lead to yield and quality issues due to inadequate solvent vapor exhaustion, especially with the use of blending agents and photochemical agents that increase solvent vapor production.
Innovation Solution
A prebaking device and system featuring a chamber with an anti-adhesive film on its inner walls, including a window with anti-adhesive film surfaces, air inlet, and air exhaust holes, which facilitates the use of a hot air system and air exhaust system to prevent solvent vapor adhesion and efficiently discharge vapors, utilizing materials like polytetrafluoroethylene or polyethylene terephthalate films that resist high temperatures and chemicals.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If blending agents and photochemical agents are added to disperse pigment particles, then color saturation and dispersion quality are improved, but solvent vapor production increases causing yield and quality issues
Solution Approach 1:
The patent extracts and removes the harmful solvent vapor from the prebaking chamber through dedicated exhaust holes and air exhaust pipes, separating the vapor removal function from the heating function to resolve the contradiction between maintaining pigment dispersion quality and preventing solvent vapor accumulation
Solution Approach 2:
The patent introduces hot air as an intermediary substance that facilitates solvent vapor removal by creating controlled air flow through the chamber, mediating between the heating process and vapor exhaustion to simultaneously achieve pigment dispersion and vapor control
2Manufacturing precision
If prebaking is performed to evaporate solvent, then photoresist processing quality is improved, but solvent vapor adhesion to chamber surfaces occurs reducing product yield
Solution Approach 1:
The patent extracts solvent vapor from the chamber environment through exhaust holes and air exhaust pipes before it can adhere to chamber surfaces, removing the harmful factor while preserving the beneficial prebaking effect on photoresist
Solution Approach 2:
The patent uses pneumatic principles by introducing hot air flow through air inlet holes and exhaust through air exhaust pipes to create directed gas flow that carries solvent vapor away from chamber surfaces, preventing adhesion while maintaining prebaking quality
3Object-generated harmful factors
If chamber walls are made adhesive to capture solvent vapor, then vapor removal is improved, but device maintenance and cleaning become more difficult
Solution Approach 1:
The patent extracts solvent vapor through dedicated exhaust pathways (exhaust holes and air exhaust pipes) rather than relying on chamber wall adhesion, achieving effective vapor removal while maintaining easy-to-clean non-adhesive chamber surfaces
Solution Approach 2:
The patent replaces the mechanical approach of vapor capture through adhesion with a fluid dynamics approach using hot air flow and exhaust systems to remove solvent vapor, eliminating the need for adhesive surfaces and simplifying maintenance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents solvent vapor adhesion, improving product yield and reducing production costs by ensuring efficient solvent vapor removal during the prebaking process, maintaining high temperature resistance and acid-base resistance for the prebaking device.
Implementation Method 1
the inner wall of the chamber is defined with an anti-adhesive film; a window, the surface of the window being defined with an anti-adhesive film
Implementation Method 2
prebaking is required after a photoresist process to evaporate the solvent inside the photoresist
Implementation Method 3
an air inlet hole, being configured to connect an air supply pipe of a hot air system
Implementation Method 4
an air exhaust hole, being configured to connect an air exhaust pipe of an exhaust system
Data Source
AI summary
The disclosure provides a prebaking device and a prebaking system for display substrate. The prebaking device includes a top plate, a bottom plate, a first side plate, a second side plate, a third side plate defined opposite to the first side plate and a fourth side plate defined opposite to the second side plate, the top plate, the bottom plate, the first side plate, the second side plate, the third side plate and the fourth side plate form a chamber cooperatively, the first side plate is defined with a window, the second side plate is defined with an air inlet hole to connect an air supply pipe of a hot air system, the fourth side plate is defined with an air exhaust hole to connect an exhaust system, the inner surface of the top plate is defined with an anti-adhere film.