Precursor Canister Resonance Sensing for Stable Vapor Supply

The patent replaces traditional mechanical measurement methods with a piezoelectric transducer that measures resonance frequency to determine remaining precursor amount. This substitution enables non-contact, precise measurement without mechanical wear, resolving the contradiction by improving measurement precision while adding only a single electronic component rather than complex mechanical systems.

The patent changes the measurement parameter from direct mass measurement to resonance frequency measurement. By monitoring changes in resonance frequency of the canister as precursor is consumed, the system achieves precise measurement of remaining amount through an indirect parameter that is easier to measure electronically, thus improving precision without proportionally increasing complexity.

The patent applies periodic vibration through the piezoelectric transducer to release trapped vapor between precursor particles. By using intermittent, periodic vibration rather than continuous agitation, the system achieves effective vapor release and improved productivity while minimizing energy consumption, as vibration is applied only when needed to maintain steady vapor supply.

The patent utilizes mechanical vibration at specific frequencies to disrupt trapped vapor pockets between precursor particles. This vibration mechanism efficiently releases trapped vapor with minimal energy input by targeting the specific frequency needed to break surface tension and release vapor, rather than using high-energy continuous agitation.