Precursor Delivery Conduits With Temperature-Gradient Particle Control
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Solution Overview
Problem
Conventional systems for delivering precursors to deposition tools face issues such as corrosion, particle creation, and impurity introduction due to high temperatures and pressures in long conduits, leading to increased servicing costs and undesirable thermal decomposition.
Innovation Solution
A system and method that operate at lower temperatures and pressures, minimizing particle creation and extending conduit lifetime by vaporizing precursors outside the fabrication area and condensing them within the area, using inert gas purging when not in use.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high temperatures and pressures are used in long conduits to deliver precursors, then precursor delivery is achieved, but corrosion, particle creation, and impurity introduction occur
Solution Approach 1:
The system changes the temperature and pressure parameters along the conduit length. The first conduit operates at lower temperature and pressure for transporting vaporized precursor, while the second conduit operates at higher temperature only near the deposition chamber. This parameter gradient approach delivers precursors effectively while minimizing thermal decomposition and particle creation in the majority of the conduit length.
Solution Approach 2:
The system applies different thermal conditions to different sections of the precursor delivery system. The vaporization region near the deposition chamber is heated to high temperature, while the majority of the conduit length operates at lower temperature. This localized heating approach maintains precursor delivery functionality where needed while minimizing harmful effects in other regions.
2Reliability
If high temperatures are used in conduits to maintain precursor vaporization, then precursor delivery is maintained, but thermal decomposition occurs
Solution Approach 1:
The system implements a temperature gradient along the conduit, with the first conduit operating at lower temperature (reducing thermal decomposition risk) and the second conduit providing higher temperature only in the immediate vicinity of the deposition chamber. This ensures precursor vaporization and delivery while minimizing thermal decomposition throughout the majority of the transport path.
3Ease of operation
If long conduits are used to deliver precursors from outside fabrication area, then precursor delivery is achieved, but servicing needs and costs increase
Solution Approach 1:
The precursor delivery system is divided into multiple segments: a first conduit for long-distance transport from outside the fabrication area, and a second conduit for final delivery to the deposition chamber. This segmentation allows the system to handle long conduit requirements while managing servicing needs through modular design and strategic placement of container systems.
Solution Approach 2:
The system performs preliminary vaporization of precursors in containers located outside the fabrication area before transport through the first conduit. This preliminary action allows the precursors to be delivered in vaporized form, reducing the risk of condensation and contamination during long conduit transport, thereby minimizing servicing needs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Minimizes particle creation and impurity introduction, reducing servicing needs and costs while maintaining precursor quality for deposition processes.
Implementation Method 1
The first conduit is configured for delivering a vaporized precursor, at a first temperature, from the at least one first container to the at least one second container
Implementation Method 2
The second conduit is configured for delivering the vaporized precursor, at a second temperature, from the at least one second container to the at least one deposition chamber
Data Source
AI summary
Systems for delivering precursors and related methods are provided. A system comprises at least one first container, at least one second container, at least one deposition chamber, a first conduit connecting the at least one first container to the at least one second container, and a second conduit connecting the at least one second container to the at least one deposition chamber. The first conduit is configured for delivering a vaporized precursor, at a first temperature, from the at least one first container to the at least one second container. The second conduit is configured for delivering the vaporized precursor, at a second temperature, from the at least one second container to the at least one deposition chamber. The first temperature is less than the second temperature.