Precursor Material Container with Finned Trays for Stable Vaporization
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Solution Overview
Problem
Conventional precursor material containers suffer from uneven discharge and unstable evaporation of solid precursor materials, leading to inefficient use of the material and incomplete vaporization.
Innovation Solution
A container design featuring subcarrier trays with fins protruding from the holder lid to form a continuous gas flow channel over the precursor material, ensuring even vaporization and complete discharge by maintaining a laminar flow with controlled Reynolds numbers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional container designs are used for precursor material storage and vaporization, then the structure is simple, but the discharge of precursor material is uneven and evaporation is unstable
Solution Approach 1:
The container is divided into multiple subcarrier trays (first, second, third trays) stacked vertically, each containing precursor material. This segmentation allows independent vaporization zones for each tray, enabling more uniform and controllable discharge of precursor material compared to a single large container.
Solution Approach 2:
Gas flow channels are introduced as a third dimension within the container structure. The channels extend vertically through the precursor material in each tray, allowing carrier gas to flow through the material from top to bottom. This dimensional addition ensures comprehensive contact between carrier gas and precursor material, achieving uniform vaporization.
2Productivity
If conventional container designs are used, then the device complexity is low, but the precursor material discharge rate is insufficient and container emptying is slow
Solution Approach 1:
Multiple subcarrier trays are stacked to create parallel vaporization pathways. Each tray independently contributes to the total precursor material discharge, effectively increasing the overall discharge rate while maintaining manageable individual tray sizes for complete emptying.
Solution Approach 2:
Vertical gas flow channels penetrate through the precursor material depth, transforming the discharge process from surface-only evaporation to volumetric vaporization. This three-dimensional gas-material contact dramatically increases the effective discharge rate and enables complete container emptying.
3Reliability
If carrier gas flows through precursor material without structured channels, then the device structure is simple, but the gas flow distribution is uneven and vaporization is inconsistent
Solution Approach 1:
Vertical gas flow channels are constructed within each subcarrier tray, extending from the top surface through the precursor material to the bottom. This structured three-dimensional pathway system ensures uniform carrier gas distribution throughout the precursor material volume, achieving consistent vaporization across all trays.
Solution Approach 2:
Each subcarrier tray is equipped with its own dedicated gas flow channels, creating localized controlled environments for vaporization. This local structuring ensures that each tray maintains optimal gas-flow-to-material ratios, resulting in consistent and reliable vaporization performance across all trays simultaneously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves stable and complete vaporization of precursor materials, ensuring a consistent and efficient delivery of vaporized precursor material for coating processes.
Implementation Method 1
the holder lid is provided with one or more fins protruding downwardly towards the subcarrier holder to form a gas flow channel covering substantially the whole area of the precursor material
Implementation Method 2
A carrier gas can be fed through the container and if required at an increased temperature to vaporize the solid precursor material by sublimation
Implementation Method 3
a heating device for heating the raw material container
Data Source
AI summary
The invention relates to a container for vaporizing a precursor material and delivering the vaporized precursor material, comprising: a receiving part bounding an inner volume; a number of subcarrier trays arranged on top of each other within the inner volume; each subcarrier tray forming a gas flow channel. At least one of the subcarrier trays includes: a subcarrier holder configured to store the precursor material, and a holder lid configured to close the subcarrier holder wherein the holder lid is provided with one or more fins protruding downwardly towards the subcarrier holder to form a gas flow channel covering substantially the whole area of the precursor material.