Precursor supply cabinet
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Solution Overview
Problem
Existing precursor supply systems for atomic layer deposition face challenges in temperature control due to ventilation gas cooling, requiring separate insulation and heating of precursor containers and conduits, which complicates temperature management and leads to interference between different precursor materials.
Innovation Solution
A precursor supply cabinet with gas-tight chambers that are ventilated externally but isolated from ventilation gas, allowing for independent temperature control of each chamber and minimizing heat transfer between them, using separate gas-tight precursor supply chambers arranged with flow gaps for ventilation and thermal separation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If all precursor containers and precursor conduits are separately insulated and heated in the ventilated space, then temperature control of individual precursors is achieved, but the control becomes difficult and complicated due to ventilation gas cooling and mutual interference between heated components
Solution Approach 1:
The ventilated space is segmented into multiple separate precursor supply chambers, each accommodating specific precursor containers. This segmentation isolates the precursors from the ventilation gas flow while maintaining individual temperature control capability, reducing the complexity of the overall temperature control system.
Solution Approach 2:
Gas-tight precursor supply chambers are introduced as intermediary structures between the ventilated space and the precursor containers. These chambers provide thermal isolation from ventilation gas while allowing controlled heating, simplifying the temperature control mechanism by eliminating the need for separate insulation and heating of each conduit.
2Temperature
If precursor containers and precursor conduits are heated to maintain elevated temperature, then precursor condensation is prevented, but the heated components affect each other making temperature control difficult
Solution Approach 1:
The precursor supply system is divided into separate gas-tight chambers, each containing specific precursor containers. This spatial segmentation prevents thermal interference between different precursors, allowing precise and independent temperature control for each chamber, thereby improving temperature control precision and reliability.
3Reliability
If ventilation gas is provided into the inner cabinet space to ventilate the precursors, then precursor supply safety is improved, but the ventilation gas cools and affects the temperature of the precursor containers and precursor conduits
Solution Approach 1:
The cabinet space is segmented into a ventilated inner cabinet space and separate gas-tight precursor supply chambers. The ventilation gas flows in the inner cabinet space, providing safety ventilation, while the gas-tight chambers isolate the precursors from this cooling gas flow, maintaining stable precursor temperatures without compromising safety.
Solution Approach 2:
Gas-tight precursor supply chambers serve as intermediary structures that allow the ventilated space to provide safety ventilation while preventing the ventilation gas from directly contacting and cooling the precursor containers. This intermediary structure resolves the conflict between safety ventilation and temperature stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables precise temperature control of precursor containers without ventilation gas interference, allowing for different temperatures within each chamber and improved thermal isolation, enhancing the efficiency of precursor supply systems in atomic layer deposition processes.
Implementation Method 1
one or more separate gas tight precursor supply chambers for accommodating precursor containers
Implementation Method 2
the precursor containers and the precursor conduits are heated with heating elements for maintaining the precursors at the elevated temperature
Implementation Method 3
two or more separate gas tight precursor supply chambers arranged spaced apart from each other inside the inner cabinet space such that one or more flow gaps is provided between the two or more separate gas tight precursor supply chambers
Data Source
AI summary
A precursor supply cabinet for accommodating one or more precursor containers having cabinet walls defining an inner cabinet space. The precursor supply cabinet includes a ventilation discharge connection arranged to discharge ventilation gas from the inner cabinet space, one or more ventilation inlet connections, two or more separate gas tight precursor supply chambers for accommodating precursor containers. The gas tight precursor supply chambers are arranged inside the inner cabinet space of the precursor supply cabinet such that the inner cabinet space of the precursor supply cabinet surrounding the separate gas tight precursor supply chambers is ventilated.