Precursor Tray Load Cell Layout for Corrosion-Resistant Level Sensing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Semiconductor processing tools face challenges in accurately measuring precursor material levels due to exposure of internal components to harsh conditions and corrosive materials, leading to degradation and inefficiencies in vapor precursor production.
Innovation Solution
A precursor delivery system incorporating a load cell assembly that measures mechanical forces exerted by trays holding precursor materials, allowing for determination of material levels through tensile or compressive forces, with options for load cell placement within or outside the ampoule and protective coatings to withstand corrosive environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If load cell is placed inside the ampoule to directly measure precursor material levels, then measurement precision is improved, but reliability deteriorates due to exposure to harsh conditions and corrosive materials
Solution Approach 1:
The system separates the measurement function from the harsh environment by placing the load cell outside the ampoule. The ampoule is segmented into an internal precursor-holding chamber and an external measurement chamber, allowing the load cell to measure tray weight without direct exposure to corrosive vapors and harsh conditions inside the ampoule.
Solution Approach 2:
The tray acts as an intermediary element that transmits the weight information of precursor materials to the load cell. The load cell measures the mechanical force exerted by the tray, which correlates to the amount of precursor material, without the load cell itself being exposed to the harsh environment.
2Reliability
If load cell is protected from harsh conditions by placing it outside the ampoule, then reliability is improved, but measurement precision deteriorates due to indirect measurement
Solution Approach 1:
The system establishes a feedback relationship where the load cell continuously monitors the weight of the tray containing precursor materials. This weight information provides real-time feedback on material levels, enabling precise monitoring while the load cell remains protected outside the ampoule.
Solution Approach 2:
The system replaces direct mechanical contact measurement with indirect mechanical force measurement. Instead of the load cell directly contacting precursor materials inside the harsh environment, it measures the mechanical force (weight) transmitted through the tray, achieving both protection and precision.
3Reliability
If corrosion resistant coating is applied to load cell, then reliability is improved, but device complexity increases
Solution Approach 1:
The system uses a disposable or replaceable tray that can be easily removed and replaced when needed. This eliminates the need for complex corrosion-resistant coatings on the load cell itself, as the tray serves as a sacrificial component that protects the load cell from direct exposure to corrosive materials.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise monitoring of precursor material levels, enhancing the efficiency and reliability of vapor precursor production by mitigating the effects of harsh conditions and corrosion.
Implementation Method 1
the load cell is coupled to the at least one tray in a configuration sufficient for the at least one tray to exert a mechanical force upon the load cell
Data Source
AI summary
A precursor delivery system for determining material levels and related methods can include an ampoule and at least one tray disposed in the ampoule. The at least one tray may be configured to hold an amount of a precursor material. A load cell assembly is also included. The load cell assembly may include a load cell. The load cell assembly may be coupled to the at least one tray in a configuration sufficient for the at least one tray to exert a mechanical force upon the load cell. This mechanical force may be correlative to the amount of precursor material present on the at least one tray and thus may be used to determine material levels within the ampoule.