Precursor Tray Load Cell Assembly for Corrosion-Protected Level Sensing
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Solution Overview
Problem
Semiconductor processing tools face challenges in accurately measuring precursor material levels due to exposure of internal components to harsh conditions and corrosive materials, leading to degradation and inefficiencies in vapor precursor production.
Innovation Solution
A precursor delivery system incorporating a load cell assembly that measures mechanical forces exerted by trays holding precursor materials, allowing for accurate determination of material levels through tensile or compressive force measurements, with the load cell optionally protected by corrosion-resistant coatings or sealed enclosures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If load cell is exposed to harsh conditions and corrosive materials for direct measurement, then measurement function is achieved, but reliability and durability deteriorate due to corrosion and degradation
Solution Approach 1:
The system is divided into two distinct segments: a sealed enclosure containing the load cell that is protected from harsh conditions, and a tray that is exposed to the corrosive environment. This segmentation allows the load cell to perform measurements without direct exposure to damaging conditions, resolving the contradiction between measurement capability and reliability.
Solution Approach 2:
A sealed enclosure acts as an intermediary between the load cell and the harsh external environment. This intermediary protects the load cell from corrosive materials while still allowing it to fulfill its measurement function through the tray, which transmits force signals through the enclosure wall to the load cell.
2Reliability
If sealed enclosure is added to protect load cell, then reliability improves, but device complexity increases
Solution Approach 1:
The sealed enclosure serves multiple functions simultaneously: it protects the load cell from corrosion, provides a mounting structure for the load cell, and allows force transmission from the tray to the load cell through its wall. This multi-functionality reduces overall device complexity despite adding the enclosure component.
Solution Approach 2:
The mounting structure for the load cell is merged with the sealed enclosure itself, rather than being a separate component. The enclosure wall integrates the mounting function, reducing the number of discrete parts and simplifying the overall device structure while maintaining protection and measurement capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise monitoring of precursor material levels, enhancing the efficiency and reliability of vapor precursor production by mitigating the effects of harsh conditions and corrosion.
Implementation Method 1
the load cell is coupled to the at least one tray in a configuration sufficient for the at least one tray to exert a mechanical force upon the load cell. In some embodiments, the mechanical force is correlative to the amount of precursor material present on the at least one tray
Data Source
AI summary
A precursor delivery system for determining material levels and related methods can include an ampoule and at least one tray disposed in the ampoule. The at least one tray may be configured to hold an amount of a precursor material. A load cell assembly is also included. The load cell assembly may include a load cell. The load cell assembly may be coupled to the at least one tray in a configuration sufficient for the at least one tray to exert a mechanical force upon the load cell. This mechanical force may be correlative to the amount of precursor material present on the at least one tray and thus may be used to determine material levels within the ampoule.