Precursor Vapor Condensation Recovery for Vacuum Pump Protection
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Solution Overview
Problem
In semiconductor device fabrication, the contamination of vacuum pump oil by chemically reactive precursor vapors leads to frequent system shutdowns for maintenance, as existing exhaust treatment devices only temporarily extend pump life without providing a permanent solution.
Innovation Solution
An apparatus and method for recovering precursor vapor by condensing it into liquid form using a heat conducting housing with thermal electric cooling, allowing for the collection and potential recycling or safe disposal of the precursor liquid, thereby reducing pump oil contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of stationary object
If high temperature plasma or vapor injection is used to treat exhaust, then pump operating life is extended, but pump maintenance frequency is not sufficiently reduced and productivity is still lost
Solution Approach 1:
The patent applies phase transition by condensing precursor vapor from gas phase to liquid phase through temperature reduction in the condenser. This separates the vapor from the gas stream before it reaches the pump, preventing contamination at its source and eliminating the need for frequent pump maintenance while maintaining continuous operation
Solution Approach 2:
The condenser extracts precursor vapor from the exhaust gas stream by condensing it into liquid form. This removal of harmful vapor before it reaches the pump protects the pump oil from contamination, extending pump life and eliminating shutdowns for maintenance
2Object-affected harmful factors
If exhaust treatment devices are used to reduce vapor reactivity, then pump oil contamination is reduced, but pump maintenance is still required frequently
Solution Approach 1:
The condenser performs preliminary action by condensing and removing precursor vapor from the exhaust stream before it reaches the pump. This preventive measure protects the pump oil from contamination in advance, eliminating the need for frequent maintenance and extending pump operating life
3Object-affected harmful factors
If precursor vapor is condensed to liquid form, then pump oil contamination is prevented, but heat removal is required to maintain condensation temperature
Solution Approach 1:
The patent converts the harmful heat generated during vapor condensation into a beneficial resource by using it to preheat the incoming precursor liquid in the bubbler. This heat recovery reduces the energy required for vaporization and minimizes the net cooling demand, making the condensation process more energy-efficient
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the frequency of pump maintenance by maintaining the precursor vapor's chemical and physical integrity, enabling its reuse or safe disposal and minimizing environmental impact, thus enhancing the reliability and productivity of the deposition system.
Implementation Method 1
the precursor vapor condense and form the precursor liquid
Implementation Method 2
a thermal electric cooler for controlling the temperature of the housing to a selected value for condensing the precursor vapor
Implementation Method 3
A multitude of heat conducting surfaces for heat transfer are included in the housing which dissipates heat outside of the housing
Implementation Method 4
dissipates heat outside of the housing
Data Source
AI summary
Methods and apparatus for recovery of precursor vapor from a gas and precursor vapor mixture used in a deposition process. The gas and precursor vapor mixture is passed through a multitude of heat transfer surfaces in a heat conducting housing causing the precursor vapor to condense. The precursor vapor in liquid form is then collected after condensation.