Pre-fabricated Metal Posts for IC Packaging Stress Absorption

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Solution Overview

Problem

The bonding of integrated circuit device dies to package substrates using solder regions or copper pillars is hindered by warpage and thermal stresses due to differing Coefficients of Thermal Expansion (CTE), leading to dielectric delamination, and existing metal post bonding processes have low throughput and poor uniformity.

Innovation Solution

Pre-fabricated metal posts, formed using a metal film and etching process with plated end portions for improved bondability, are used to absorb stress and are efficiently bonded to package components using a capillary system, eliminating the need for time-consuming cutting actions and allowing simultaneous bonding.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If metal posts are formed by bonding and cutting metal wires, then stress absorption is improved, but throughput deteriorates and length uniformity deteriorates

Engineering Contradiction:
Improvestress absorptionVSAvoidthroughput
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

Metal posts are pre-formed with predetermined lengths through efficient processes like etching and rolling before bonding. This preliminary fabrication eliminates the time-consuming cutting step during bonding, thereby improving throughput while maintaining uniform length and stress absorption capabilities

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The cutting operation is extracted and eliminated from the bonding process by pre-fabricating metal posts to the exact required lengths. This separation of operations allows the bonding process to focus solely on joining, significantly improving throughput without compromising the stress absorption function

Inventive Principle:
Principle #2Taking out (Extraction)

2Reliability

If metal posts are formed by bonding and cutting metal wires, then stress absorption is improved, but manufacturing precision deteriorates

Engineering Contradiction:
Improvestress absorptionVSAvoidlength uniformity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

Metal posts are pre-formed with predetermined lengths through efficient processes like etching and rolling before bonding. This preliminary fabrication eliminates the time-consuming cutting step during bonding, thereby improving throughput while maintaining uniform length and stress absorption capabilities

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The manufacturing method transitions from mechanical cutting (which causes variability) to controlled processes like etching and rolling that produce metal posts with predetermined, uniform lengths. This parameter change in the fabrication approach directly improves length uniformity while preserving stress absorption

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If traditional bonding processes are used, then process simplicity is maintained, but bond quality deteriorates due to warpage and thermal stress

Engineering Contradiction:
Improveprocess simplicityVSAvoidbond quality
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

Plated end portions are applied to specific locations (ends) of the metal posts to enhance bondability at the bonding interfaces. This localized treatment improves bond quality without complicating the overall process, as only the endpoint regions require plating while the post bodies remain simple

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The metal posts combine different materials or coatings (base metal post material plus plated end portions) to achieve both stress absorption and enhanced bondability. This composite structure improves bond quality while maintaining process efficiency

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The pre-fabricated metal posts effectively absorb thermal stresses, improve bond quality, and increase throughput by enabling simultaneous bonding and uniformity, reducing dielectric delamination and enhancing the packaging process efficiency.

Implementation Method 1

Pre-fabricated metal posts with plated end portions are used

Methodology Applied
Scientific EffectPlating: Electroplating

Implementation Method 2

The metal posts are longer than typical solder regions and metal pillars, and hence may absorb the stress

Methodology Applied
Scientific EffectStress absorption: Elasticity

Data Source

PatentUS10034390B2Metal post bonding using pre-fabricated metal posts
Publication Date: 2018.07.24 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US10034390B2 patent drawing
  • US10034390B2 patent drawing
  • US10034390B2 patent drawing

AI summary

A method includes forming a plurality of metal posts. The plurality of metal posts is interconnected to form a metal-post row by weak portions between neighboring ones of the plurality of metal posts. The weak portions include a same metal as the plurality of metal posts. A majority of each of the plurality of metal posts is separated from respective neighboring ones of the plurality of metal posts. An end portion of each of the plurality of metal posts is plated with a metal. The plurality of metal posts is disposed into a metal post-storage. The method further includes retrieving one of the metal posts from a metal-post storage, and bonding the one of the metal posts on a metal pad.