Press Roller Compensation Layer for Imprint Uniformity

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Solution Overview

Problem

Conventional imprint methods often result in residual layers and inaccurate pattern formation due to uneven substrate surfaces, leading to deteriorated imprint quality, especially when stepped portions are present.

Innovation Solution

A press roller with a cylindrical body and an energy generating part featuring individually controllable energy units and a compensation layer that expands in volume when energy is applied, composed of polymeric binders with different glass transition temperatures, is used to control the thickness of the compensation layer, ensuring uniform imprinting over stepped substrate surfaces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a conventional imprint method is used on an uneven substrate surface, then the imprinting process can be completed, but residual layers are formed at stepped portions and pattern accuracy deteriorates

Engineering Contradiction:

Improveimprint pattern accuracyVSAvoidsubstrate surface uniformity requirement

Core Design Contradiction:

Manufacturing precisionVSEase of operation

Solution Approach 1:

The press roller incorporates a compensation layer with spatially varying thickness to match the substrate's stepped topography. The thickness of the compensation layer is locally adjusted so that its upper surface aligns with the upper surface of the resin layer across different stepped portions, ensuring uniform contact and imprint quality without requiring the entire substrate surface to be uniformly flat.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The compensation layer's thickness parameter is dynamically adjusted to correspond to the height differences of stepped portions on the substrate. By changing the thickness parameter of the compensation layer in different regions, the system adapts to varying substrate topographies, maintaining consistent imprint pressure and pattern accuracy across uneven surfaces.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If the substrate has stepped portions, then the substrate structure is maintained, but residual layers form and imprint quality deteriorates

Engineering Contradiction:

Improvesubstrate structure integrityVSAvoidimprint pattern quality

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

The compensation layer acts as an intermediary element between the press roller and the substrate with stepped portions. It mediates the contact interface by providing a tailored thickness profile that bridges the height differences of stepped portions, ensuring uniform pressure distribution and preventing residual layer formation while preserving the original substrate structure.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Device complexity

If a uniform press roller is used, then the device structure is simple, but it cannot compensate for surface variations

Engineering Contradiction:

Improvepress roller structureVSAvoidimprint consistency on uneven surfaces

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The press roller features a compensation layer with non-uniform thickness distributed according to the substrate's topography. Different regions of the compensation layer have different thicknesses tailored to compensate for specific stepped portions, allowing the roller to maintain simplicity in overall structure while achieving local adaptation to surface variations for consistent imprint quality.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively minimizes imprint defects by allowing precise control of the compensation layer's thickness, improving the quality of the imprint pattern even on substrates with complex surface topographies.

Implementation Method 1

a compensation layer disposed on the energy generating part, the compensation layer including a material that expands in volume when the energy is applied

Methodology Applied

Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 2

The plurality of energy generating units may be configured to generate heat or microwaves

Methodology Applied

Scientific EffectHeating: Heating

Implementation Method 3

The compensation layer may include a first polymeric binder and a second polymeric binder, and wherein a first glass transition temperature of the first polymeric binder is at least 20 centigrade degrees higher than a second glass transition temperature of the second polymeric binder

Methodology Applied

Scientific EffectGlass transition: Phase Change

Data Source

PatentUS10466587B2Press roller and imprint method using the same

Publication Date: 2019.11.05 SAMSUNG DISPLAY CO LTD

AI summary

A press roller for imprint method including: a roller body having a cylindrical shape extending in a first direction; an energy generating part disposed on a curved surface of the roller body, the energy generating part including a plurality of energy generating units configured to be individually controlled to emit energy; and a compensation layer disposed on the energy generating part, the compensation layer including a material that expands in volume when the energy is applied.