Pressure-Activated Seal Structure for High-Pressure Substrate Treatment
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Solution Overview
Problem
Existing methods for sealing high-pressure treatment spaces in substrate treatment processes result in particle production, damage to sealing members, and potential breakdown of driving members, leading to process failures.
Innovation Solution
An apparatus and method that utilize a sealing member positioned in a sealing groove, which is deformed by the pressure of the treatment space to seal the gap between the upper and lower bodies, thereby minimizing particle production and preventing damage to the sealing member.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If fluid pressure is used to push bodies into close contact to seal the treatment space, then sealing effectiveness is improved, but particle production increases due to collision between bodies
Solution Approach 1:
A buffer member is positioned between the upper body and lower body to absorb impact energy when they come into contact. This cushioning mechanism prevents direct collision between the bodies, thereby reducing particle generation while maintaining the sealing function achieved through fluid pressure.
2Reliability
If strong force is applied by driving member to seal the high-pressure space, then sealing reliability is improved, but damage to sealing member increases over time
Solution Approach 1:
The buffer member is positioned to absorb impact forces before they reach the sealing member. This protective cushioning reduces the mechanical stress and damage accumulated by the sealing member over time, extending its service life while maintaining sealing reliability.
3Reliability
If bodies are pushed into close contact to maintain high-pressure space, then process reliability is improved, but driving member breakdown risk increases
Solution Approach 1:
The buffer member absorbs impact forces that would otherwise be transmitted to the driving member. This reduces the mechanical load and stress on the driving member, preventing breakdown while maintaining the high-pressure space necessary for process reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively seals the treatment space without damaging the sealing member, reducing particle production, and preventing driving member breakdown, thus ensuring process reliability.
Implementation Method 1
The sealing member is deformed to be in close contact with the second body by pressure of the treatment space when a process is performed
Implementation Method 2
a heating member to heat the treatment space such that a fluid supplied to the treatment space is heated to a critical temperature or more
Data Source
AI summary
Provided are an apparatus and a method for treating a substrate at a high-pressure atmosphere. The apparatus for treating the substrate includes a first body and a second body combined with each other to define a treatment space in which the substrate is treated, a sealing member interposed between the first body and the second body to seal the treatment space from an outside at a position in which the first body is in close contact with the second body, and a driving member to drive the first body or the second body such that the treatment space is open or closed. The sealing member is positioned in a sealing groove formed in the first body. The sealing member is deformed to be in close contact with the second body by pressure of the treatment space when a process is performed.