High-Pressure Chamber Fastening With Friction-Reducing Protrusions
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Solution Overview
Problem
The existing fastening structures in high-pressure substrate processing chambers experience wear and particle formation due to friction, leading to contamination of the workpiece.
Innovation Solution
A high-pressure substrate processing apparatus with a fastening module that includes a support protrusion and an engaging protrusion, where one of the protrusions is equipped with a friction reduction member made of a softer material, reducing friction and wear during the fastening process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a fastening structure with interlocked housing and door is used to maintain high pressure, then the sealing performance is improved, but friction and wear occur causing particle formation and contamination
Solution Approach 1:
A friction reduction member (intermediary element) is introduced between the engaging protrusion and support protrusion to reduce direct metal-to-metal contact. This mediator decreases friction and wear during fastening operations while maintaining the sealing function of the chamber.
Solution Approach 2:
The friction characteristics of the contact surface are changed by applying a friction reduction member with different material properties (lower friction coefficient). This parameter change reduces wear and particle generation while preserving the mechanical fastening function.
2Device complexity
If the fastening structure uses direct contact between protrusions, then the device complexity is reduced, but wear and particle formation increase
Solution Approach 1:
The friction reduction member serves as a simple intermediary component that minimally increases device complexity while dramatically reducing material wear and particle formation during fastening operations.
3Object-generated harmful factors
If friction reduction member is added to the protrusion body, then wear is reduced and particle formation decreases, but device complexity increases
Solution Approach 1:
The friction reduction member is a simple intermediary component that, despite adding a small amount of complexity, effectively reduces particle formation and wear.
Solution Approach 2:
The friction reduction member is made of materials with different properties (lower friction coefficient) than the protrusion body, creating a composite structure that reduces wear while maintaining mechanical function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus significantly reduces wear and particle formation, maintaining sealing performance and minimizing contamination of the workpiece.
Implementation Method 1
one of the support protrusion and the engaging protrusion includes a protrusion body, and a friction reduction member mounted on the protrusion body to come into contact with the other one of the support protrusion and the engaging protrusion during the transition from the first relationship to the second relationship, and having a lower frictional coefficient than the protrusion body and the other one of the support protrusion and the engaging protrusion
Data Source
Figure 1
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AI summary
The present invention provides a high-pressure substrate processing apparatus comprising: an inner chamber accommodating a substrate to be processed; an outer chamber provided with an outer housing accommodating the inner chamber and an outer door which is formed to be movable between a closed state in which the outer housing is closed and an open state in which the outer housing is opened; and a fastening module which is formed to fasten the outer housing with the outer door in the closed state, in order to maintain a processing gas for processing the substrate at a first pressure that is greater than the atmospheric pressure in the inner chamber and maintain a protecting gas at a second pressure that is set in relation to the first pressure in the outer chamber, wherein the fastening module comprises: a support protrusion installed on the outer housing; and a stopper protrusion which is installed on the outer door and is supported by the support protrusion through movement. One of the support protrusion and the stopper protrusion comprises: a protrusion body; and a friction reduction member which is attached to the protrusion body to come into contact with the other one of the support protrusion and the stopper protrusion during the movement, and has a frictional coefficient that is less than the frictional coefficient of the protrusion body and the other one of the support protrusion and the stopper protrusion.