High-Pressure Chamber Sealing With Magnetic Particle Capture

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Solution Overview

Problem

During the fastening process of a high-pressure substrate processing chamber, friction can lead to the formation of foreign materials that contaminate the substrate.

Innovation Solution

A high-pressure substrate processing apparatus is designed with a capture module that includes a magnetic force unit to adsorb metal particles formed during the fastening process, minimizing substrate contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the housing and door are firmly fastened with each other to maintain high pressure, then the sealing reliability is improved, but friction occurs during fastening which generates foreign materials that contaminate the substrate

Engineering Contradiction:

Improvesealing reliabilityVSAvoidsubstrate contamination

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A capture module is introduced as an intermediary component between the fastening module and the substrate. This module includes a magnetic force unit that generates a magnetic field to attract and capture metal particles generated during fastening, preventing them from contaminating the substrate while allowing the fastening process to proceed normally

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The harmful metal particles generated by friction during fastening are converted into a manageable problem by using magnetic force to selectively attract and capture these ferromagnetic particles. The magnetic force unit transforms the harmful contamination effect into a controlled capture process, where particles are deliberately drawn to a specific location (the capture module) rather than randomly dispersing and contaminating the substrate

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus effectively captures foreign materials generated during the fastening process, reducing the risk of substrate contamination and maintaining the integrity of the processing environment.

Implementation Method 1

a capture module disposed to be adjacent to a contact position between the external housing and the external door for their fastening, and configured to capture a foreign material

Methodology Applied

Scientific EffectMagnetic force: Magnetism

Data Source

PatentEP4571822A1High pressure substrate processing apparatus

Publication Date: 2025.06.18 HPSP CO LTD

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AI summary

Provided is a high pressure substrate processing apparatus including: an inner chamber accommodating a substrate to be processed and a reaction gas supplied at a first pressure higher than an atmospheric pressure; an outer chamber including an external housing accommodating the inner chamber, and an external door movable between a closed state where the external housing is closed and an opened state where the external housing is opened, and accommodating a protective gas supplied at a second pressure set with respect to the first pressure; a fastening module configured to fasten the external housing with the external door in the closed state; and a capture module disposed to be adjacent to a contact position between the external housing and the external door for their fastening, and configured to capture a foreign material.