Pressure Flow Controller Shutoff Response
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional pressure-type flow controllers in semiconductor manufacturing devices have poor shutoff response characteristics due to the large internal volume of the fluid passage between the control valve and the orifice, leading to slow gas exhaust and low gas replaceability.
Innovation Solution
The design includes a control valve and an on/off valve fixed in horizontal and vertical positions respectively, with an orifice and pressure sensor integrated to minimize the internal volume of the fluid passage, using a metal diaphragm valve body and an orifice-built-in valve configuration to reduce the distance and volume between the control valve and the orifice, and a pressure sensor with a compact pressure introducing pipe to further minimize the fluid passage volume.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If the internal volume of the fluid passage between the control valve and orifice is reduced, then the shutoff response characteristics are improved, but the device complexity increases due to the need for compact integration of components
Solution Approach 1:
The orifice and on/off valve are integrated into a single component unit, eliminating separate connections and reducing the internal volume of the fluid passage between the control valve and orifice. This merging of components directly addresses the need to reduce shutoff response time while managing the complexity through functional integration.
Solution Approach 2:
The pressure sensor is positioned such that its pressure introducing pipe is inserted into the fluid passage, with the pipe tip located between the control valve and orifice. This nesting arrangement allows the pressure sensor to be integrated into the existing structure without significantly increasing the overall device volume, thereby reducing shutoff time while controlling complexity.
2Productivity
If the distance between the control valve and orifice is reduced, then the gas replaceability is enhanced, but the manufacturing precision requirements increase
Solution Approach 1:
The orifice and on/off valve are combined into a single component, which inherently reduces the distance between the control valve and orifice. This integration enhances gas replaceability by minimizing the fluid passage volume, while the manufacturing precision challenge is addressed through the unified component design that eliminates multiple connection points.
3Loss of time
If the fluid passage volume is minimized, then the shutoff characteristics are improved, but the ease of manufacture decreases
Solution Approach 1:
The orifice and on/off valve are manufactured as a single integrated component, which simplifies the assembly process despite the minimized fluid passage volume. This merging approach improves shutoff characteristics while maintaining ease of manufacture by reducing the number of separate parts that need to be assembled and connected.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly improves the shutoff characteristics by reducing the internal volume of the fluid passage, enhancing gas replaceability and responsiveness, and facilitates easier integration and piping due to aligned fluid inlets and outlets.
Implementation Method 1
a pressure sensor (8) fixed to the main body (4) for detecting the internal pressure of the fluid passage (3) between the control valve for pressure control (5) and the orifice (7)
Implementation Method 2
a control valve for pressure control (5) fixed in a horizontal position to the main body (4) for opening/closing the fluid passage (3)
Implementation Method 3
an on/off valve (6) fixed in a vertical position to the main body (4) for opening/closing the fluid passage (3) on the downstream side of the control valve for pressure control (5)
Implementation Method 4
an orifice (7) provided in the fluid passage (3) on the upstream side of the on/off valve (6)
Data Source
AI summary
The pressure-type flow controller includes a main body provided with a fluid passage, a control valve for pressure control fixed in a horizontal position to the main body, an on/off valve fixed in a vertical position to the main body on the downstream side of the control valve for pressure control, an orifice provided in the fluid passage on the upstream side of the on/off valve, and a pressure sensor fixed to the main body for detecting the internal pressure of the fluid passage between the control valve for pressure control and the orifice. The fluid passage includes a first passage portion in a horizontal position connected to the control valve for pressure control, a second passage portion in a vertical position connecting the first passage portion to the orifice, and a third passage portion in a horizontal position connecting the second passage portion to the pressure sensor.