Pressure Gauge Error Compensation via Switching Valve Segmentation

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Solution Overview

Problem

Conventional pressure measuring devices in substrate processing apparatuses fail to accurately recognize and compensate for errors in pressure gauges, leading to incomplete vacuum adjustments and prolonged maintenance times due to the inability to accurately identify and correct measurement shifts.

Innovation Solution

A pressure measuring device with a first and second pressure gauge connected to the processing chamber, where the second gauge is disconnected during processing to prevent contamination and a controller adjusts the pressure adjustment valve based on the difference between the two gauges to accurately compensate for errors in the first gauge.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single pressure gauge is used to measure internal pressure during processing, then the device complexity is reduced, but the measurement precision deteriorates due to inability to accurately recognize and compensate gauge errors

Engineering Contradiction:

Improvenumber of pressure gaugesVSAvoidpressure measurement accuracy

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The pressure measurement function is segmented into two independent pressure gauges (first and second pressure gauges) that operate in different modes. The first pressure gauge measures during processing, while the second pressure gauge is used for error detection by comparing readings when disconnected from the processing chamber. This segmentation allows simultaneous maintenance of simple operational structure and high measurement precision through error recognition.

Inventive Principle:

Principle #1Segmentation

2Adaptability or versatility

If the second pressure gauge remains connected to the processing chamber during processing, then the error recognition function is maintained, but the reliability deteriorates due to contamination of the pressure gauge

Engineering Contradiction:

Improveerror recognition capabilityVSAvoidpressure gauge contamination resistance

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The connection state of the second pressure gauge is made dynamic rather than static. A switching valve controls the connection/disconnection of the second pressure gauge based on processing status. During processing, the second pressure gauge is disconnected to prevent contamination and maintain reliability. During error detection phases, it is connected to enable comparison measurements. This dynamic configuration resolves the contradiction between maintaining error recognition capability and preventing contamination.

Inventive Principle:

Principle #15Dynamics

3Measurement precision

If zero-adjustment is performed periodically to compensate pressure gauge errors, then the measurement precision is improved, but the loss of time increases due to periodic maintenance interruptions

Engineering Contradiction:

Improvepressure gauge accuracyVSAvoidmaintenance time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The system performs preliminary error detection by continuously monitoring pressure readings and comparing them between the first and second pressure gauges. Instead of waiting for periodic maintenance intervals, the error recognition happens in advance during normal operation or between processing cycles. This allows compensation to be performed only when actually needed, reducing unnecessary maintenance time while maintaining measurement precision.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise error recognition and compensation of pressure gauges, reducing maintenance time and ensuring accurate pressure control within the processing chamber.

Implementation Method 1

a first pressure gauge connected to a processing chamber configured to process a process target and configured to measure an internal pressure of the processing chamber

Methodology Applied

Scientific EffectDiaphragm deformation: Deformation

Implementation Method 2

a second pressure gauge connected to the processing chamber; and a first switching valve configured to disconnect the second pressure gauge from the processing chamber when the process target is being processed inside the processing chamber

Methodology Applied

Scientific EffectPressure differential measurement: Pressure Gradient

Data Source

PatentUS10429263B2Pressure measuring device and exhaust system using the same, and substrate processing apparatus

Publication Date: 2019.10.01 TOKYO ELECTRON LTD

AI summary

There is provided a pressure measuring device including: a first pressure gauge connected to a processing chamber configured to process a process target and configured to measure an internal pressure of the processing chamber when the process target is being processed; a second pressure gauge connected to the processing chamber; and a first switching valve configured to disconnect the second pressure gauge from the processing chamber when the process target is being processed inside the processing chamber.