Film Forming Apparatus Pressure Gauge Zero Point Adjustment

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Diaphragm-type pressure measurement devices face challenges in accurately measuring pressure when solids are attached to the diaphragm, leading to deformation and measurement errors, which affect the accuracy of pressure readings in pressure-reducible pressing containers.

Innovation Solution

A film forming apparatus with a pressure-reducible processing container, a pressure gauge, and a controller that adjusts the zero point of the pressure gauge by evacuating the container to the highest reachable vacuum degree and executing a film forming process until the ultimate pressure reaches a target range, ensuring accurate pressure measurement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual zero-point adjustment is performed, then measurement precision is improved, but loss of time increases due to manual intervention

Engineering Contradiction:

Improvepressure reading accuracyVSAvoidadjustment time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The pressure gauge performs automatic zero-point adjustment by itself without manual intervention. The system uses the pressure gauge's own readings during vacuum evacuation to automatically calculate and apply the zero-point correction value, eliminating the need for manual adjustment while maintaining measurement precision.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The zero-point adjustment is performed automatically during the vacuum evacuation process before actual pressure measurements are taken. The system calculates the zero-point correction value based on pressure readings obtained during evacuation, so the adjustment is already in place when measurements begin.

Inventive Principle:

Principle #10Preliminary action

2Measurement precision

If frequent zero-point adjustment is performed, then measurement precision is improved, but productivity decreases due to increased downtime

Engineering Contradiction:

Improvepressure reading accuracyVSAvoidfilm forming output

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The pressure gauge automatically performs zero-point adjustment without requiring system shutdown or manual intervention. This allows the adjustment to occur during normal operation cycles, minimizing downtime and maintaining productivity while ensuring measurement precision.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The zero-point adjustment is performed periodically at predetermined intervals during film forming processes. The controller automatically executes adjustment cycles based on timing or process conditions, ensuring measurements remain accurate without requiring frequent manual interruptions.

Inventive Principle:

Principle #19Periodic action

3Productivity

If automatic zero-point adjustment is implemented, then productivity is improved by reducing manual intervention, but device complexity increases

Engineering Contradiction:

Improvefilm forming outputVSAvoidcontrol system complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The pressure gauge serves multiple functions: it measures pressure during film forming processes and simultaneously performs automatic zero-point adjustment. The same sensor and controller used for measurement also handle the adjustment calculation and application, eliminating the need for separate adjustment mechanisms.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system uses feedback from the pressure gauge's own readings during vacuum evacuation to automatically calculate the zero-point correction value. The controller monitors the pressure readings, computes the correction needed, and applies it automatically, creating a self-regulating system that doesn't require external intervention.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method automates the zero-point adjustment of the pressure gauge, reducing downtime and improving productivity by minimizing manual intervention and ensuring consistent, accurate pressure readings.

Implementation Method 1

there is known a pressure measurement device capable of reducing, even when a solid is attached to the diaphragm, the influence of stress exerted by the attached solid on the deformation of the diaphragm

Methodology Applied

Scientific EffectDiaphragm deformation: Deformation

Implementation Method 2

when a solid is attached to the diaphragm

Methodology Applied

Scientific EffectVapor deposition: Physical Vapour Deposition

Data Source

PatentUS11486041B2Film forming apparatus, control device, and pressure gauge adjustment method

Publication Date: 2022.11.01 TOKYO ELECTRON LTD

AI summary

A film forming apparatus includes: a pressure-reducible processing container; a pressure gauge configured to detect a pressure in the processing container; and a controller, wherein the controller is configured to repeat a cycle including a step of adjusting a zero point of the pressure gauge and a step of executing a film forming process in the processing container until an ultimate pressure, which is detected by the pressure gauge when an interior of the processing container is evacuated to a highest reachable vacuum degree after the step of executing the film forming process, reaches a target range.