Pressure Regulating Device for Semiconductor Pipe Leakage Prevention
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Solution Overview
Problem
In semiconductor production, pipe breakage leading to liquid leakage causes pollution and yield decrease, with existing technologies lacking effective monitoring and prevention measures.
Innovation Solution
A pressure regulating device with a suction pump, pressure sensor, storage unit, and control unit is integrated into the semiconductor production system to detect and respond to pressure changes in pipes, preventing liquid leakage by adjusting pressure and alerting operators to pipe breaks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a liquid supply system is used to maintain temperature stability in semiconductor production, then temperature control is improved, but liquid leakage from pipe breakage causes pollution and yield decrease
Solution Approach 1:
The suction pump creates a negative pressure state in the pipe before any breakage occurs. This preliminary anti-action ensures that when pipe breakage happens, the liquid cannot leak outward because the internal pressure is already lower than the external atmospheric pressure, thus preventing pollution while maintaining temperature control functionality
Solution Approach 2:
The system converts the potential harmful effect of pipe breakage into a beneficial monitoring opportunity. By installing pressure sensors that detect pressure changes caused by breakage, the system transforms what would be a silent failure into a detectable event that triggers alerts and prevents yield loss
2Reliability
If traditional pressure monitoring is implemented, then pipe breakage detection is improved, but the system complexity and cost increase
Solution Approach 1:
The suction pump serves multiple functions: it maintains negative pressure for leak prevention, drives liquid circulation for temperature control, and creates the pressure differential necessary for breakage detection. This multi-functionality reduces the need for separate monitoring systems while improving reliability
Solution Approach 2:
The pressure sensor provides continuous feedback to the control unit about the pressure state in the pipe. When breakage occurs and pressure changes, the control unit receives this feedback and triggers appropriate responses such as alerts or shutdown procedures, enabling reliable detection without complex additional systems
3Object-affected harmful factors
If the suction pump operates at high rotation speed to maintain negative pressure, then liquid leakage prevention is improved, but energy consumption increases
Solution Approach 1:
The suction pump's rotation speed is dynamically adjusted based on system conditions. The control unit monitors pressure sensor data and modulates the pump speed accordingly, using higher speeds only when needed to maintain negative pressure during critical operations, thus reducing overall energy consumption while ensuring leak prevention when required
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively prevents liquid leakage, allows for analysis of yield decrease causes, and improves production process stability by recording pressure changes and generating alerts for timely operator intervention.
Implementation Method 1
The suction pump is disposed in the downstream of the semiconductor production apparatus and connected with the pipe, sucking the liquid inside the pipe
Implementation Method 2
The pressure sensor is disposed between the semiconductor production apparatus and the suction pump, detecting a pressure value of the pipe between the semiconductor production apparatus and the suction pump
Data Source
AI summary
A pressure regulating device cooperates with a semiconductor production system to regulate a pressure in a pipe of a semiconductor production apparatus in the semiconductor production system. The pressure regulating device reduces the pressure in the pipe of the semiconductor apparatus by a suction pump to prevent from liquid leakage when the pipe is broken. In addition, the pressure regulating device can periodically record the pressure change in the pipe to facilitate an operator to judge whether the pipe is damaged and analyze the cause of decrease in production yield.