Pressure Sensor Bypass Design for Pulsation and Residual Liquid Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional pressure sensors in pressure-differential flow rate meters face challenges with high-temperature fluids and pulsation, leading to damage and retention of residual liquids during washing, particularly in semiconductor manufacturing applications where cleanliness and uniformity are critical.
Innovation Solution
A pressure sensor design with a pressure measuring unit installed in a straight-pipe portion of the main fluid flow path, connected via smaller diameter inlet and outlet pipes, forming a bypass flow path that alleviates pulsation and fluid hammer, and using a fluorocarbon polymer sheet to prevent contact with the fluid, enhancing displacement performance and preventing floating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the pipe diameter of the pressure inlet pipe is reduced to protect against high-temperature fluids and pulsation, then damage reduction is achieved, but liquid displacementability deteriorates due to increased dead volume
Solution Approach 1:
The pressure inlet pipe is divided into two sections: a first section with a larger diameter connected to the main fluid flow path, and a second section with a smaller diameter connected to the pressure measuring unit. This segmentation allows the system to maintain large diameter for good liquid displacementability while using small diameter for damage reduction in the pressure measuring unit.
Solution Approach 2:
Different sections of the pressure inlet pipe have different diameters tailored to their specific functions. The first section has larger diameter to facilitate complete liquid displacement and reduce dead volume, while the second section has smaller diameter to protect the pressure measuring unit from damage by high-temperature fluids and pulsation.
2Reliability
If the pressure inlet pipe is made longer to separate the pressure measuring unit from the main fluid flow path, then protection against pulsation and fluid hammer is improved, but dead volume increases making liquid displacement difficult
Solution Approach 1:
The pressure inlet pipe is segmented into two sections with different diameters. The first section (larger diameter) minimizes dead volume for complete liquid displacement, while the second section (smaller diameter) provides protection against pulsation and fluid hammer, achieving both goals simultaneously.
Solution Approach 2:
Different sections of the pressure inlet pipe have different diameters optimized for their specific functions. The first section has larger diameter to reduce dead volume and improve liquid displacementability, while the second section has smaller diameter to provide protection against pulsation and fluid hammer.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enables complete and easy liquid displacement during washing, reduces damage from pulsation and fluid hammer, and prevents retention of residual liquids, ensuring cleanliness and accuracy in high-temperature applications.
Implementation Method 1
a fluorocarbon polymer sheet to prevent contact with the fluid
Implementation Method 2
the inlet pipe and the outlet pipe whose pipe diameters are smaller than the main fluid flow path... alleviates pulsation and fluid hammer
Data Source
AI summary
In a pressure sensor that detects the pressure of liquid flowing in a main fluid flow path, a pressure measuring unit is installed by providing a pressure measuring space at a position branching from a straight-pipe portion of the main fluid flow path, and, in addition, the main fluid flow path and the pressure measuring space are connected with an inlet pipe and an outlet pipe whose pipe diameters are smaller than the main fluid flow path.