Pressure Sensor Calibration System with Localized Fluid Heating
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Solution Overview
Problem
The existing calibration systems for pressure sensors in etching processes are time and energy consuming due to the need to heat the entire fluid to a predetermined temperature, resulting in costly and inefficient calibration processes.
Innovation Solution
A calibration system where the heater is positioned within the communication pipe and the target pressure sensors are mounted on a chamber body, reducing the volume of fluid to be heated by isolating the heated space, thereby minimizing the time and energy required for calibration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the heater heats the entire fluid in the calibration system to the predetermined temperature, then the calibration accuracy is ensured, but the time and energy consumption increase significantly
Solution Approach 1:
The calibration system divides the fluid heating process into segments: only the fluid in the communication pipe between the heater and reference pressure sensor is heated, not the entire fluid volume in the calibration system. This segmentation reduces energy consumption while maintaining calibration accuracy by focusing thermal energy only where needed for the measurement process.
2Measurement precision
If the heater heats the entire fluid in the calibration system to the predetermined temperature, then the calibration accuracy is ensured, but the calibration time becomes excessively long
Solution Approach 1:
The system segments the fluid volume requiring heating to only the communication pipe portion between the heater and reference pressure sensor. This reduces the thermal mass that must be heated, thereby significantly reducing calibration time while still achieving the predetermined temperature needed for accurate calibration measurements.
Solution Approach 2:
The heater is positioned to preheat the fluid in the communication pipe before it reaches the reference pressure sensor. This preliminary heating action ensures that the fluid is at the correct temperature for calibration measurements without requiring continuous heating of the entire system, thus reducing overall calibration time.
3Measurement precision
If the heater heats the entire fluid in the calibration system, then the calibration can be performed, but the heat loss during fluid flow makes the process costly and ineffective
Solution Approach 1:
The system segments the heating zone to only the communication pipe between the heater and reference pressure sensor, preventing unnecessary heating of other fluid portions. This eliminates heat loss that would occur from heating and subsequently cooling large volumes of fluid, making the calibration process more energy-efficient and cost-effective.
Solution Approach 2:
The heater provides localized heating only to the fluid in the communication pipe where it is needed for calibration measurements. This local quality approach ensures that thermal energy is applied precisely where required, minimizing heat loss to other parts of the system and improving overall process efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly reduces the time and energy needed for sensor calibration by heating only the fluid within the defined space, enhancing the efficiency and cost-effectiveness of the calibration process.
Implementation Method 1
The heater is configured to heat a fluid in the space
Data Source
AI summary
A calibration system for calibrating pressure sensor comprises communication pipe, base, inlet valve, outlet valve, pump, inlet pipe, heater and reference pressure sensor. The communication pipe has first and second openings. The base comprises chamber body and outlet being disposed at the chamber body. The inlet valve is disposed at the first opening. The chamber body is connected to the second opening so as to define a space between the inlet valve and the outlet valve. The heater is to heat a fluid in the space. The reference pressure sensor is configured to measure a pressure of the fluid. The at least one target pressure sensor is detachably mounted on the chamber body via the base so as to measure the pressure of the fluid in the space.