Pressure Sensor Calibration via Mechanical Volume Adjustment
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Solution Overview
Problem
Current pressure sensors in PCB wet processing equipment face calibration challenges due to temperature changes and varying medium filling states, with existing electronic circuit methods limiting pressure adjustment range and increasing costs.
Innovation Solution
A pressure sensor with a physical calibration method using a casing, diaphragm, sensing element, and adjustable calibration elements that change pressure applied to a medium within an accommodating space, allowing for precise pressure adjustments without relying on electronic circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electronic circuit method is used for calibration, then initial value calibration can be performed, but pressure adjustment range is limited and electronic circuit cost is higher
Solution Approach 1:
The patent replaces the electronic circuit calibration method with a mechanical calibration method. A calibration element (such as a calibration bolt or calibration spring) is mechanically adjusted to apply a known force to the diaphragm, thereby calibrating the sensing element. This mechanical substitution eliminates the need for complex electronic circuitry while achieving accurate pressure calibration through physical force application.
Solution Approach 2:
The patent changes the calibration approach from electrical parameter adjustment to mechanical parameter adjustment. By varying the mechanical force applied through the calibration element (changing the physical parameter of force), the system achieves pressure calibration without relying on electronic circuit adjustments. This parameter change expands the pressure adjustment range and reduces circuit complexity.
2Device complexity
If fixed cavity volume is used in pressure sensor, then structure is simple, but volume cannot be changed according to medium filling state causing pressure errors
Solution Approach 1:
The patent introduces a dynamic calibration mechanism that allows the cavity volume to be adjusted based on medium filling state. The calibration element can be mechanically adjusted to change the effective cavity volume, enabling the sensor to adapt to different filling conditions (such as different silicone oil levels) and maintain accurate pressure sensing without requiring a completely complex reconfigurable structure.
3Stress or pressure
If calibration element volume is increased in accommodating space, then pressure applied to medium increases, but available space is reduced
Solution Approach 1:
The calibration element is designed to be nested within or integrated into the existing sensor structure. For example, the calibration element may be a movable plug or piston that fits within the accommodating space, allowing it to displace the medium and apply pressure without significantly increasing the overall sensor volume. The calibration element operates within the confines of the existing cavity, efficiently using the available space.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables a broader pressure calibration range with lower costs and greater simplicity, allowing for effective pressure value adjustments and zeroing calibrations by physically altering the volume of the calibration elements within the sensor's accommodating space.
Implementation Method 1
The medium is filled in the accommodating space and in contact with the sensing element. When the calibration element is moved relative to the casing, the calibration element changes a pressure applied to the medium.
Data Source
AI summary
A pressure sensor with calibration device includes a casing, a diaphragm, a sensing element, a medium, and at least one calibration element. The diaphragm is disposed on the casing, wherein the casing and the diaphragm define an accommodating space. The sensing element is disposed in the casing. The medium is filled in the accommodating space and in contact with the sensing element. The at least one calibration element is adjustably disposed at the casing and extended into the accommodating space to be in contact with the medium, wherein when the at least one calibration element is moved relative to the casing in a direction toward the accommodating space or in a direction away from the accommodating space, the at least one calibration element changes the pressure applied to the medium. The pressure sensor with calibration device adjusts the pressure value sensed by the sensing element via the calibration element.