Pressure Sensor Cantilever Segmentation for Leakage Reduction
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Solution Overview
Problem
Existing pressure sensors face high power consumption and leakage current issues due to constant power supply to piezoresistive elements and adjacent element interactions.
Innovation Solution
A pressure sensor design featuring a cantilever with a communication opening, partitioned displacement detection portions, and branch detection portions with varying resistance values, connected to electrodes, which reduces power consumption and leakage by optimizing resistance values and structural geometry.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If power is constantly supplied to pressure-sensitive elements for detection, then detection function is maintained, but power consumption increases
Solution Approach 1:
The patent implements periodic measurement cycles where the pressure sensor is activated only when needed rather than continuous operation. The control unit determines measurement timing based on operational conditions, enabling the system to maintain detection capability while reducing overall power consumption by keeping the sensor in a low-power state during non-measurement periods.
2Measurement precision
If multiple pressure-sensitive elements are provided on the diaphragm surface, then detection coverage is improved, but leakage current between adjacent elements increases
Solution Approach 1:
The patent divides the pressure-sensitive element into multiple separate regions (first, second, third, and fourth pressure-sensitive elements) that are spatially segmented on the diaphragm surface. Each segment is electrically isolated from the others, allowing independent measurement while preventing leakage current between adjacent elements. This segmentation enables comprehensive pressure detection across different diaphragm regions without the harmful interaction of electrical leakage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design decreases power consumption, improves detection accuracy, and enhances sensitivity by effectively managing resistance values and stress concentrations, while minimizing leakage between adjacent detection portions.
Implementation Method 1
a pressure sensor which includes a substrate which has a gap portion inside the substrate, a diaphragm portion which configures a portion of an inner wall of the gap portion, and a pressure-sensitive element such as a piezoresistor which is provided on the surface of the diaphragm portion
Implementation Method 2
a cantilever which is disposed so as to close the communication opening in a cantilever state in which a distal end portion of the cantilever is a free end and a proximal end portion thereof is supported by the sensor main body, and which is bent according to a pressure difference between the cavity and the outside of the sensor main body
Data Source
Figure 1~2
Figure 3
Figure 4
AI summary
The present invention relates to a pressure sensor (1) which detects variation in pressures, the pressure sensor including a cantilever (4) which is bent according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and an intra-lever gap (21) which is formed on a proximal end portion (4a) of the cantilever. The proximal end portion is partitioned into a first support portion (22) and a second support portion (23) by an intra-lever gap in a second direction (L2) orthogonal to a first direction (L1) in which the proximal end portion and a distal end portion (4b) are connected to each other in plan view. A doped layer (24) which is provided on a portion of the first and second support portions forms a first displacement detection portion (25) and a second displacement detection portion (26). Lengths of the first and second displacement detection portions are shorter than those of the first and second supports along the second direction.