MEMS Pressure Sensor With Groove Damper For Impact Protection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Pressure sensors configured by micro electro mechanical systems (MEMS) are prone to damage from external impacts and liquid intrusion due to the transmission of forces through surrounding structures, which can lead to sensor damage and increased time lag in pressure sensing.
Innovation Solution
A pressure sensor design featuring a base, sensor, surrounding portion with a groove, coupling portion, and a damper portion in the groove that applies resistance to the surrounding portion's movement, reducing impact transmission and liquid intrusion through the use of a beam and elastic film, and optionally incorporating a cap portion with a through-hole and projections to manage liquid and gas flow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the sensor and surrounding portion are separated by a groove, then impact transmission is reduced, but large impacts can still damage the sensor when the surrounding portion moves and contacts the sensor
Solution Approach 1:
A damper portion is introduced as an intermediary element between the surrounding portion and the sensor. This damper portion absorbs and dissipates impact energy before it reaches the sensor, preventing direct transmission of impact forces while maintaining the protective groove structure.
2Object-affected harmful factors
If the groove is occupied by liquid, then impact transmission to the sensor increases, but preventing liquid intrusion requires additional structural complexity
Solution Approach 1:
The damper portion serves as a barrier that prevents liquid from entering the groove space. By blocking the groove with the damper structure, liquid intrusion is prevented while maintaining the groove's original function of reducing impact transmission, eliminating the need for additional liquid prevention structures.
3Object-affected harmful factors
If a damper portion is added to the groove, then impact transmission is reduced, but device complexity increases
Solution Approach 1:
The damper portion is integrated with the existing groove structure rather than being added as a separate component. The damper portion utilizes the groove space and combines with the surrounding portion and sensor assembly, merging multiple functions (impact absorption, structural support, and liquid barrier) into a unified structure that minimizes overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the transmission of external impacts to the sensor, prevents damage, and minimizes liquid intrusion, maintaining the effectiveness of squeeze film damping while reducing the need for smaller through-holes, thus minimizing time lag in pressure sensing.
Implementation Method 1
a damper portion in the groove to apply a resistance to the surrounding portion moving toward the sensor
Implementation Method 2
maintaining the effectiveness of squeeze film damping
Data Source
AI summary
A pressure sensor includes a base, a sensor facing the base in a height direction with a space between the sensor and the base to sense pressure applied to a sensing surface on a side opposite to the base in the height direction, a surrounding portion raised in the height direction from the base and surrounding the sensor with a groove extending around the sensor, between the surrounding portion and the sensor, a coupling portion coupling the sensor with the surrounding portion, and a beam in the groove to apply a resistance to the surrounding portion moving toward the sensor.