Pressure Sensor Structure with Guard Substrate for Noise and Condensation
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Solution Overview
Problem
Existing pressure sensor structures are prone to disturbances such as liquid condensation and electromagnetic noise, which can lead to shifts in pressure output values.
Innovation Solution
The pressure sensor structure includes a sensor body with a diaphragm plate, a base electrode, and a sidewall layer, supported by a conductive guard substrate that functions as a guard electrode, reducing the impact of disturbances.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the base substrate end surfaces are exposed to the environment, then the sensor structure is simpler and easier to manufacture, but liquid condensation and electromagnetic noise can adhere to the surfaces causing shifts in pressure output values
Solution Approach 1:
The patent extracts the harmful interaction between the environment and the base substrate by introducing a guard substrate that electrically insulates the base substrate from external disturbances. The guard substrate is positioned between the base substrate and the environment, selectively blocking harmful factors (liquid condensation, electromagnetic noise) while maintaining the overall sensor structure's functionality.
Solution Approach 2:
The guard substrate acts as an intermediary element between the base substrate and the external environment. It provides electrical insulation and prevents direct contact between environmental factors and the base substrate, thereby protecting the pressure measurement system without complicating the manufacturing process.
2Measurement precision
If a guard substrate is added to protect against disturbances, then measurement precision improves, but device complexity increases
Solution Approach 1:
The patent segments the sensor structure into distinct functional components: the base substrate for structural support, the guard substrate for electrical insulation and protection, and the sensing elements. This segmentation allows each component to perform its specific function efficiently while maintaining overall system simplicity.
Solution Approach 2:
The guard substrate serves multiple functions simultaneously: it provides electrical insulation, protects against liquid condensation, shields from electromagnetic noise, and maintains structural integrity. This multi-functionality reduces the need for additional protective components, thereby limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents shifts in pressure output values due to liquid condensation and electromagnetic noise, ensuring high precision in pressure measurement.
Implementation Method 1
a pressure sensor structure to detect a change in interelectrode electrostatic capacitance
Implementation Method 2
the guard substrate is electrically connected to the guard electrode layer to function as a guard electrode together with the guard electrode layer
Data Source
AI summary
A pressure sensor structure includes a sensor body including a diaphragm plate that functions as a sense electrode, a base electrode that faces the diaphragm plate, and a sidewall layer maintaining a gap between the diaphragm plate and the base electrode, and a conductive guard substrate to support the sensor body. The sidewall layer includes a guard electrode layer and upper and lower electrically insulating layers to electrically insulate the guard electrode layer. An electrically insulating layer is between the guard substrate and the sensor body to electrically insulate the guard substrate. The guard substrate is electrically connected to the guard electrode layer to function as a guard electrode together with the guard electrode layer.