Pressure Sensor Inclined Surface Prevents Fluid Stagnation
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Solution Overview
Problem
Existing pressure sensors in fluid measurement systems, particularly in semiconductor manufacturing, face challenges with accurate pressure measurement due to stagnation of compressible fluids, which leads to coagulation, measurement errors, and malfunctions under temperature changes.
Innovation Solution
The pressure sensor design incorporates an inclined surface in the pressure introduction flow channel to prevent stagnation of compressible fluids, reducing measurement errors and allowing for accurate pressure detection, while the differential pressure type flow meter and flow rate controller utilize paired pressure sensors with this design to enhance flow rate measurement accuracy and temperature responsiveness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the pressure detecting unit is arranged at an upper end portion of a pressure introduction flow channel branched in a T-shape upward from the primary fluid flow channel, then the pressure sensor can be installed in the fluid flow channel for pressure measurement, but compressible fluid such as air or gas stagnates in the pressure introduction flow channel and rises to the pressure-receiving surface, making accurate pressure measurement difficult
Solution Approach 1:
The pressure introduction flow channel is inverted to branch downward from the primary fluid flow channel instead of upward. This inversion prevents compressible fluid from stagnating and rising to the pressure-receiving surface, as the downward branching allows fluid to flow naturally away from the pressure detection area, eliminating the coagulation problem while maintaining measurement functionality
Solution Approach 2:
The pressure introduction flow channel is configured to extend in the downward direction (vertical dimension) rather than upward, creating a dimensional change in the fluid path. This downward extension ensures that compressible fluid does not accumulate at the pressure-receiving surface, preventing stagnation and coagulation while enabling accurate pressure measurement
2Measurement precision
If the pressure sensor is installed in the circulation circuit for chemical solution to ensure stable supply, then the chemical solution can be monitored, but stagnation of slurry solution triggers coagulation, making pressure measurement impossible
Solution Approach 1:
The pressure introduction flow channel branches downward instead of upward, inverting the traditional configuration. This prevents slurry solution from stagnating and coagulating in the pressure introduction path, maintaining measurement capability while eliminating the harmful coagulation effect that would otherwise render pressure measurement impossible
Solution Approach 2:
The pressure detection function is extracted from the main chemical solution flow path by using a separately configured pressure introduction flow channel that branches downward. This separation prevents coagulation in the measurement path while allowing continuous monitoring of the chemical solution in the main circulation circuit
3Measurement precision
If the compressible fluid enters the interior of the pressure introduction flow channel, then it rises to the pressure-receiving surface and stagnates between the fluid and the pressure-receiving surface, but this stagnation causes various problems on pressure measurement and the semiconductor process
Solution Approach 1:
The pressure introduction flow channel is inverted to branch downward, preventing compressible fluid from rising to the pressure-receiving surface. This eliminates the stagnation that causes dynamic pressure variations and measurement errors, ensuring accurate pressure detection while avoiding harmful effects on the semiconductor process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures accurate and stable pressure measurement and flow rate control by preventing fluid stagnation, reducing coagulation risks, and enabling quick temperature adaptation, thereby improving the overall accuracy and reliability of fluid flow measurement and control.
Implementation Method 1
the pressure introduction flow channel includes an inclined surface extending in a direction to increase an opening area on the side of an inlet port of the fluid on a wall surface on the downstream side in terms of the direction of flow of the fluid
Implementation Method 2
a pressure detecting unit arranged in a pressure introduction flow channel branched in a T-shape upward from a primary fluid flow channel in which fluid to be subjected to pressure measurement flows
Implementation Method 3
a differential pressure type flow meter which calculates the flow rate by converting the pressure difference between the both pressure sensors into the flow rate
Data Source
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AI summary
A pressure sensor having a structure in which compressible fluid is prevented from stagnating in the vicinity of a pressure-receiving surface of the pressure sensor in the interior of a pressure introducing portion is provided. In a pressure sensor 21B including a sensor body 23 arranged in a pressure introduction flow channel 22A branched in a T-shape upward from a primary fluid flow channel 12 in which fluid to be subjected to pressure measurement flows, the pressure introduction flow channel 22A includes an inclined surface 28 extending in a direction to increase an opening area on the side of an inlet port of the fluid on a wall surface on the downstream side in terms of the direction of flow of the fluid.