Pressure Sensor Insulating Layer Reduces Initial Load Dispersion
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Solution Overview
Problem
Existing pressure sensors face challenges in achieving consistent initial load for pressure sensing due to misalignment and thickness variations in the spacer layer, leading to dispersion in output characteristics, particularly for high-resolution and large-scale applications.
Innovation Solution
A pressure sensitive element with a support substrate, an electroconductive conductor pattern, and an insulating layer having an opening where at least part of the opening edge falls on the conductor pattern, allowing precise control of the insulating layer thickness and reducing initial load dispersion by forming the insulating layer continuously over the substrate and conductor pattern.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a spacer layer is used to keep the sensor electrode and pressure sensing resistor apart, then the electrical characteristic stability is improved, but misalignment and thickness variations cause dispersion in initial load
Solution Approach 1:
The patent removes the separate spacer layer entirely and replaces it with an insulating coating formed directly on the sensor electrode. This extraction of the spacer component eliminates the alignment and thickness control issues that caused initial load dispersion, while the insulating coating still provides the necessary electrical isolation between the sensor electrode and pressure sensing resistor.
Solution Approach 2:
The patent merges the functions of the sensor electrode and the spacer into a single integrated structure. The insulating coating is formed directly on the sensor electrode surface, combining the electrical conduction function of the electrode with the electrical isolation function of the spacer, thereby eliminating misalignment issues between separate components.
2Reliability
If the spacer thickness is increased to ensure adequate insulation, then electrical isolation is improved, but the initial load for pressure sensing increases and dispersion worsens
Solution Approach 1:
The patent changes the parameter of insulating layer formation from a separate spacer component with variable thickness to a coating process where the insulating layer thickness is controlled by coating parameters. This allows precise control of the thickness parameter, ensuring adequate electrical isolation while maintaining consistent initial load across sensors.
Solution Approach 2:
The patent replaces the mechanical spacer layer with a deposited insulating coating. This substitution transitions from a mechanically assembled component (spacer) to a conformally deposited layer, eliminating the need for precise mechanical thickness control and alignment, thereby reducing initial load dispersion.
3Ease of manufacture
If a separate spacer component is used, then assembly is simplified, but alignment accuracy between the spacer and sensor electrode deteriorates
Solution Approach 1:
The patent merges the spacer function into the sensor electrode structure itself by forming an insulating coating directly on the electrode surface. This integration eliminates the need for separate spacer components and their associated alignment procedures, thereby improving alignment accuracy while maintaining manufacturing simplicity.
Solution Approach 2:
The patent performs the insulating layer formation as a preliminary action during the electrode fabrication process itself, before the pressure sensing resistor is applied. This preliminary formation of the insulating coating ensures precise alignment with the electrode pattern without requiring subsequent alignment operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the stability and reliability of pressure sensors by minimizing dispersion in initial load and output characteristics, enabling precise pressure measurement across various applications, including high-resolution and large-scale sensing.
Implementation Method 1
an insulating layer having an opening, and being provided between the support substrate and the pressure sensing film
Implementation Method 2
a pressure sensor capable of suppressing dispersion in the initial load of pressure... a pressure sensitive element whose electrical characteristic such as resistivity varies depending on pressurizing force
Data Source
AI summary
This invention provides a pressure sensitive element capable of suppressing dispersion in the initial load for pressure sensing among the sensor electrodes or among the pressure sensors. The pressure sensitive element has a support substrate, a sensor electrode, a pressure sensing film and an insulating layer. The pressure sensing film is arranged opposing to the sensor electrode. The insulating layer has an opening and is provided between the support substrate and the pressure sensing film. At least a part of an opening edge of the opening is fallen on the sensor electrode. An exposed part as a part of the sensor electrode is exposed inside the opening, while leaving a buried part as the other part of the sensor electrode buried under the insulating layer.