Pressure Sensor Melt-Sealed Gas Passage for Faster Manufacturing
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Solution Overview
Problem
Existing pressure sensors in the semiconductor industry face challenges with complex manufacturing processes, low efficiency, and precision issues due to gas leakage through exposed cut-off portions of copper tubes, leading to material waste and increased costs.
Innovation Solution
A pressure sensor design featuring a top cover assembly with a blocking member that seals the gas guide passage by melting and solidifying at a preset temperature, eliminating the need for vacuum pumps and copper tubes, allowing simultaneous manufacturing of multiple sensors and enhancing structural stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If copper tubes and vacuum pumps are used to seal the pressure reference chamber, then gas leakage is prevented, but the manufacturing process becomes complex and efficiency decreases
Solution Approach 1:
The patent removes the copper tube and vacuum pump components from the sealing system, replacing them with a simplified structure where the pressure reference chamber is sealed by the top cover assembly and movable membrane without requiring external vacuum pumping equipment or separate sealing tubes.
Solution Approach 2:
The patent integrates the sealing function directly into the top cover assembly and movable membrane structure, combining the chamber formation and sealing functions into a single integrated structure rather than using separate components like copper tubes and vacuum pumps.
2Object-generated harmful factors
If copper tubes are used for gas guide passage, then gas flow is enabled, but gas leakage occurs through exposed cut-off portions
Solution Approach 1:
The patent eliminates the copper tube component entirely, removing the source of gas leakage through exposed cut-off portions. The gas guide passage is reconfigured to work without separate sealing tubes, preventing gas leakage and eliminating the associated material waste.
Solution Approach 2:
The patent replaces the expensive copper tube sealing method with a simpler, more cost-effective sealing structure that does not require precious metal materials, reducing both material cost and potential gas leakage issues.
3Productivity
If traditional pressure sensor manufacturing is used, then pressure detection is achieved, but manufacturing efficiency is low and production time is long
Solution Approach 1:
The pressure reference chamber is pre-formed by the top cover assembly and movable membrane structure before final assembly, eliminating the need for post-assembly vacuum pumping and sealing operations. This preliminary formation of the sealed chamber significantly reduces manufacturing steps and production time.
Solution Approach 2:
The patent removes the vacuum pump and copper tube sealing steps from the manufacturing process, eliminating time-consuming operations and enabling faster production while maintaining sealing integrity.
4Measurement precision
If copper tubes are used for sealing, then structural stability is achieved, but precision declines due to gas leakage
Solution Approach 1:
The patent removes the copper tube sealing system that caused gas leakage and precision degradation, replacing it with an integrated sealing structure that maintains both structural stability and measurement precision by eliminating the leakage pathway.
Solution Approach 2:
The patent uses the top cover assembly and movable membrane as a composite sealing structure that provides both mechanical stability and gas tightness, replacing the copper tube system with an integrated design that maintains structural integrity while preventing gas leakage for accurate pressure detection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution increases manufacturing efficiency and structural stability, preventing gas leakage while ensuring high precision in pressure detection, thus reducing production time and costs.
Implementation Method 1
the blocking member seals the gas guide passage after being heated to a temperature higher than a preset melting temperature to be at least partially melted and being cooled to solidify
Implementation Method 2
the blocking member seals the gas guide passage after being heated to a temperature higher than a preset melting temperature to be at least partially melted and being cooled to solidify
Data Source
AI summary
Provided is pressure sensor, including top cover assembly, upper seat, movable membrane; each of top and bottom of upper seat is provided with opening, top cover assembly seals opening at top of upper seat, movable membrane seals opening at bottom of upper seat; top cover assembly, upper seat, movable membrane form pressure reference chamber, and pressure sensor detects gas pressure on side of movable membrane away from top cover assembly based on state of movable membrane; at least one gas guide passage is formed at top cover assembly, and is configured to connect pressure reference chamber to outside; top cover assembly includes at least one blocking member configured to seal gas guide passage; and blocking member seals gas guide passage after being heated to temperature higher than preset melting temperature to be at least partially melted and being cooled to solidify. Manufacturing method for pressure sensor is further provided.