Pressure Sensor Membrane Layout to Prevent Impact Damage
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Solution Overview
Problem
Pressure sensors are prone to deformation, damage, and changes in characteristics due to external impacts, such as those encountered during manufacturing and use in electronic devices, which affect the accuracy of atmospheric pressure measurements.
Innovation Solution
A pressure sensor device with a base and an oscillator, where the membrane does not overlap the base in plan view, featuring an isolation groove and elastic coupling to allow oscillation, reducing collision and increasing distance from joint portions, thus minimizing deformation and damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the membrane overlaps the base in plan view, then the structure is compact, but the membrane is prone to collision and damage during impact
Solution Approach 1:
The patent positions the membrane such that it does not overlap the base in plan view, utilizing spatial arrangement in the horizontal plane to prevent collision. This dimensional repositioning allows the membrane to be located laterally offset from the base, eliminating the collision risk while maintaining structural integrity.
2Device complexity
If the support substrate is supported by a cantilever structure, then the structure is simple, but the membrane collides with the joint substrate during vibration
Solution Approach 1:
The patent extracts the membrane from the collision-prone area by positioning it laterally offset from the base and joint substrate. This separation removes the membrane from the harmful interaction zone where collision occurs during vibration, while the support substrate maintains its simple cantilever structure.
3Volume of moving object
If the gap between support substrate and joint substrate is small, then the structure is compact, but the membrane characteristics change due to pressure changes during vibration
Solution Approach 1:
The patent utilizes lateral positioning in plan view to separate the membrane from the base, creating spatial distance without increasing vertical height. This allows the structure to maintain compactness in the vertical dimension while improving reliability through horizontal separation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The structure effectively reduces deformation, damage, and changes in membrane characteristics due to external impacts, enhancing measurement accuracy and sensitivity to pressure changes.
Implementation Method 1
a capacitor including a membrane that is deformable in accordance with an ambient pressure difference as a sensor electrode
Implementation Method 2
an oscillator to oscillate with respect to the base
Data Source
AI summary
A pressure sensor device includes a base including joint portions to join to a mounting substrate, and an oscillator to oscillate with respect to the base. The oscillator includes a capacitor including a membrane that is deformable in accordance with an ambient pressure difference as a sensor electrode and a facing electrode spaced apart from the membrane. The membrane does not overlap the base in plan view in a direction orthogonal or substantially orthogonal to the membrane.