Pressure Sensor Shield Member Isolates Substrate
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Solution Overview
Problem
In pressure sensor apparatuses, direct attachment of a tube to the cap can apply force to the semiconductor substrate and terminal, potentially degrading measurement accuracy.
Innovation Solution
A pressure sensor apparatus design that includes a substrate with sensors, a cover attached to form housing spaces, and a shield member positioned between the cover and substrate to block air passage, preventing direct force application to the sensors and maintaining measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a tube is directly attached to a cap that covers the package, then the structure is simple and easy to manufacture, but force is applied to the semiconductor substrate and terminal which degrades measurement accuracy
Solution Approach 1:
The patent introduces a cap as an intermediary component between the tube and the package. The cap receives the tube attachment and transmits force through itself rather than directly to the semiconductor substrate and terminal, thereby protecting the sensitive components from deforming forces while maintaining the simplicity of direct tube-to-cap attachment
2Device complexity
If the cover is attached directly to the substrate, then the structure is compact and simple, but force from tube attachment degrades sensor measurement accuracy
Solution Approach 1:
The shield member acts as an intermediary barrier between the cover and substrate. It blocks the transmission of deforming forces from the cover attachment to the substrate and sensor, while still allowing the cover to be attached to the substrate for structural support and sealing
Solution Approach 2:
The patent segments the force transmission path by introducing the shield member as a separate component. This segmentation isolates the sensor from direct force application while maintaining the overall structural integrity through the cover-substrate attachment
Data Source
AI summary
A pressure sensor apparatus, including: a substrate; a sensor provided on the substrate and configured to measure absolute pressure; a cover attached to the substrate to form a housing space, in which the sensor is housed, with the substrate; and a shield member. The cover is attached to the substrate with the shield member disposed therebetween and fully blocking passage of air therebetween. The cover has a hole through which the housing space communicates with an outside of the housing space.