Pressure Sensor Layout With Separate Temperature Body for Accurate Correction
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Solution Overview
Problem
Existing pressure and temperature sensors face challenges in precise measurement due to cross-influences between the pressure and temperature measurement bodies, with delays in temperature changes affecting pressure measurements and variations in sensor chip manufacturing leading to calibration difficulties.
Innovation Solution
A pressure and temperature sensor design featuring a sensor body with a recessed portion, diaphragm, and a buffering member with a flat-plate base and ring-shaped peripheral wall, along with a communication passage, allowing for precise temperature correction of pressure measurements by separating and stabilizing the pressure and temperature measurement bodies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If a sensor chip integrally including pressure measurement body and temperature measurement body is used, then the sensor can be downsized, but the structure is limited and cross-influences between measurement bodies occur
Solution Approach 1:
The patent divides the measurement system into separate pressure measurement body and temperature measurement body, each independently arranged in the accommodation space. This segmentation eliminates the cross-influences that occur in integrated chips while maintaining compactness through proper spatial arrangement and use of transmission substance.
2Device complexity
If pressure measurement body and temperature measurement body are arranged in the same accommodation space, then the sensor structure is compact, but pressure changes and temperature changes of transmission substance influence each other
Solution Approach 1:
The patent introduces transmission substance (such as silicon oil) as an intermediary medium between the diaphragm and the measurement bodies. This transmission substance transmits pressure and temperature changes uniformly to both measurement bodies, allowing them to be arranged in the same space while minimizing direct cross-influences between the measurement bodies themselves.
3Measurement precision
If separate pressure measurement body and temperature measurement body are used, then cross-influences are reduced, but temperature changes are delayed affecting pressure measurement accuracy
Solution Approach 1:
The transmission substance serves as a thermal intermediary that conducts temperature changes from the diaphragm to both measurement bodies simultaneously. This ensures that the temperature measurement body responds promptly to temperature changes while the pressure measurement body also receives accurate temperature information for correction, eliminating delays.
4Measurement precision
If sensor chip requires calibration for pressure and temperature for individual object, then measurement precision can be improved, but manufacturing complexity and time increase
Solution Approach 1:
The patent employs correction values that account for temperature influences on pressure measurement. By pre-determining correction parameters through design rather than individual calibration, the system achieves high measurement precision without requiring time-consuming individual calibration for each sensor unit, thus simplifying manufacturing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves precise pressure and temperature measurements by minimizing physical changes to the measurement bodies and correcting for temperature influences, ensuring accurate readings even under varying fluid conditions.
Implementation Method 1
a pressure measurement body that outputs a pressure signal in accordance with a pressure of a fluid to be measured
Implementation Method 2
a temperature measurement body that outputs a temperature signal in accordance with a temperature of the fluid to be measured
Implementation Method 3
The pressure measurement body outputs a pressure signal in accordance with a pressure of the transmission substance which receives a pressure of the fluid to be measured via the diaphragm
Implementation Method 4
The temperature measurement body outputs a temperature signal in accordance with a temperature of the transmission substance which receives a temperature of the fluid to be measured via the diaphragm
Implementation Method 5
When a pressure is applied to the sensor chip, an intermediate voltage of the bridge circuit that functions as the pressure measurement body is changed
Implementation Method 6
When a temperature of the sensor chip is changed, a voltage between both ends of the bridge circuit that functions as the temperature measurement body is changed
Data Source
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AI summary
An object is to provide a pressure and temperature sensor capable of precisely measuring a pressure. A sensor body 15, a diaphragm 21 defining an accommodation space R together with the sensor body 15, and a transmission substance S charged in the accommodation space R are provided, and a pressure measurement body 16 and a temperature measurement body 17 which is a separate body from the pressure measurement body 16 are disposed in the accommodation space R.