Pressure Sensor with Thin-Film Substrate and Phase-Transition Material
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Solution Overview
Problem
Conventional pressure sensors face issues due to high costs, limited reusability, and the need for power supplies, and they often experience substrate separation or cracking due to thermal expansion differences in high-temperature environments.
Innovation Solution
A pressure sensor utilizing a functional titanium oxide material with crystal grains of β-phase and λ-phase trititanium pentoxide that changes crystalline structure with temperature and pressure, featuring a substrate with a thin-film section to reduce shear stress and prevent substrate separation, and allowing for reuse without a power supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional thermocouples or thermopaints are used for high-temperature measurement, then temperature measurement capability is achieved, but the cost becomes expensive
Solution Approach 1:
The patent uses inexpensive trititanium pentoxide nanoparticles instead of expensive noble metals or specialized high-temperature thermopaints. The functional element can be replaced after use, providing a cost-effective solution for high-temperature measurement applications.
Solution Approach 2:
The patent exploits phase transition temperature parameters of trititanium pentoxide (melting point around 1500°C) to enable high-temperature measurement. By selecting materials with specific thermal properties, the system achieves high-temperature capability without the cost of traditional solutions.
2Ease of operation
If conventional pressure sensors are used, then pressure measurement is achieved, but reusability is limited and power supply is required
Solution Approach 1:
The functional element automatically resets after use by being removed from the high-temperature environment, allowing the crystalline structure to revert to its original state. This self-resetting mechanism eliminates the need for external power supplies or complex reset mechanisms, enabling repeated use.
Solution Approach 2:
The patent utilizes reversible phase transitions of trititanium pentoxide crystalline structure in response to temperature and pressure changes. The material transitions between different crystalline phases during measurement and automatically returns to its initial state after cooling, enabling multiple measurement cycles without power supply.
3Ease of manufacture
If the substrate and functional element have different thermal expansion coefficients, then mounting is achieved, but substrate separation or cracking occurs in high-temperature environments
Solution Approach 1:
The patent employs a thin-film substrate that can accommodate thermal expansion differences between the substrate and the functional element. The thin-film structure provides flexibility and reduces mechanical stress during thermal cycling, preventing separation or cracking in high-temperature environments.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides an inexpensive, reusable pressure sensor that effectively measures temperature and pressure with reduced substrate separation and cracking, maintaining crystalline structure changes after cooling and pressure removal.
Implementation Method 1
at least a portion of crystal grains of at least one of β-phase trititanium pentoxide (β-Ti3O5) and λ-phase trititanium pentoxide (λ-Ti3O5) change into crystal grains of titanium dioxide (TiO2) when the functional titanium oxide is heated to 350° C. or higher
Implementation Method 2
the substrate and the functional element normally have a great difference in thermal expansion coefficient
Data Source
AI summary
A pressure sensor 1 according to the first aspect of the invention includes: a substrate 50; and a functional element 40 which is laid on the substrate 50 and is composed of functional titanium oxide including crystal grains of at least one of β-phase trititanium pentoxide (β-Ti3O5) and λ-phase trititanium pentoxide (λ-Ti3O5) and having the property that at least a portion of crystal grains of at least one of β-phase trititanium pentoxide (β-Ti3O5) and λ-phase trititanium pentoxide (λ-Ti3O5) change into crystal grains of titanium dioxide (TiO2) when the functional titanium oxide is heated to 350° C. or higher. The substrate 50 includes a substrate thin-film section 51 having a thin film form in which the thickness in the stacking direction of the substrate 50 and the functional element 40 is smaller than that in the other directions.