Pressure Measurement Smoothing With Statistical Distance Switching
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Solution Overview
Problem
Existing computational formulas for smoothing processing in sensor data, such as pressure monitoring in semiconductor process chambers, face a trade-off between stability and followability, where stability is prioritized at the cost of delayed response to input value fluctuations, especially when fluctuations are gentle or slight.
Innovation Solution
A computation device that switches between two computational formulas based on a statistical distance calculation, using a first formula for stability and a second for followability, with a formula changing unit adjusting coefficients to adapt to input value fluctuations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a computational formula with a large number of moving averages is used to ensure stability, then the stability of the output value is improved, but the followability deteriorates because the output value does not quickly follow input value fluctuations
Solution Approach 1:
The patent applies dynamics by making the computational formula adjustable based on input value characteristics. The system switches between a first computational formula (with more moving averages for stability) and a second computational formula (with fewer moving averages for faster response) depending on whether the input value is deemed stable or fluctuating, thus resolving the contradiction between stability and response speed
Solution Approach 2:
The patent changes the parameter of the computational formula by switching between different formulas with different numbers of moving averages. This parameter change allows the system to adapt the smoothing intensity dynamically, using stronger smoothing when stability is needed and weaker smoothing when rapid response is required
2Measurement precision
If a threshold is set to detect fluctuation amount for switching computational formulas, then the ability to capture fluctuations is improved, but the device complexity increases due to additional determination logic
Solution Approach 1:
The patent uses feedback by continuously monitoring the input value and comparing it with previous values to determine fluctuation. This feedback mechanism allows the system to automatically switch between computational formulas based on real-time input characteristics, improving fluctuation detection without requiring overly complex determination logic
Data Source
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AI summary
A computation device includes a reception unit 10 that receives an input value from a sensor S, a data group storage unit 40 that stores a data group including a plurality of input values acquired in advance, a statistical distance calculation unit 50 that calculates a statistical distance of the input value received by the reception unit 10 with respect to the data group, a smoothing processing unit 20 that performs smoothing processing on the input value received by the reception unit 10, a determination unit 70 that determines whether or not the statistical distance satisfies a predetermined condition, and a formula changing unit 80 that changes a computational formula used in the smoothing processing from a first computational formula used in a case where the statistical distance satisfies the predetermined condition to a second computational formula having higher followability in a case where the statistical distance does not satisfy the predetermined condition.