Fuse-Protected Pressure Switch for Relay Terminal Overcurrent

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Solution Overview

Problem

Pressure switches in substrate processing apparatus can malfunction due to overheating of relay terminals, leading to continuous signal transmission despite relay shutdown, posing a safety risk.

Innovation Solution

A pressure switch with a fuse installed in the electrical line, which trips when current exceeds a threshold, preventing continuous signal transmission and protecting the relay terminals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a relay is used in the pressure switch to operate with a particular current rating, then the pressure switch can function as an interlocking device, but the relay terminals may melt due to over current and provide continuity between terminals even when the relay turns off, compromising safety

Engineering Contradiction:
Improveinterlocking functionVSAvoidterminal melting
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A fuse is installed in the electrical line of the pressure switch to preliminarily protect against overcurrent conditions. The fuse is positioned to melt before the relay terminals can overheat and melt, preventing the harmful effect of terminal melting while maintaining the interlocking function. This preliminary protective measure ensures that the fuse breaks the circuit before damage can occur to the relay terminals.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents malfunction by ensuring the pressure switch turns off when excessive pressure or current is detected, maintaining safety and reliability in substrate processing systems.

Implementation Method 1

the fuse tripped when a current flow on the fuse exceeds a threshold current value

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS20260066201A1Safety pressure switch
Publication Date: 2026.03.05 ASM IP HLDG BV
  • US20260066201A1 patent drawing
  • US20260066201A1 patent drawing
  • US20260066201A1 patent drawing

AI summary

A safety pressure switch is presented. For avoiding pressure switch malfunction, the present disclosure presents a safety pressure switch comprising: a container shaped as a cylinder, the container comprising a fuse room comprising a fuse socket, a switch room, and a separator comprises a hole; a pressure switch disposed in the switch room; a fuse disposed in the fuse socket; and a first electrical line and a second electrical line connected to the pressure switch through the hole, wherein the separator separates the fuse room and the switch room, and wherein the hole connects the fuse room and the switch room, and wherein the fuse is installed in the first electrical line.