Built-in Self-test Structure for Pressure Tester
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Solution Overview
Problem
The high cost of conventional test equipment for wafer-level pressure sensors hinders cost reduction and market expansion due to the need for specialized equipment and environments, making it difficult to efficiently test these devices.
Innovation Solution
A built-in self-test structure for pressure testers, comprising a substrate with membrane layers, a fixing portion, an electrical heating unit, and a sensing circuit unit, where the electrical heating unit increases pressure in a cavity defined by the membrane layers, causing small deformations that the sensing circuit unit detects to output a test signal, allowing for self-testing without external pressure equipment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional test equipment is used to build up vacuum cavity or provide external pressure, then testing can be performed, but testing cost is high and testing efficiency is low
Solution Approach 1:
The patent merges the testing function into the pressure sensor device itself by integrating a heating element and pressure sensing capability within the same structure. The heating element generates pressure changes that the membrane layers detect, eliminating the need for separate external testing equipment and vacuum chambers.
Solution Approach 2:
The pressure sensor performs self-testing by using its own heating element to generate pressure changes and its own membrane layers to detect these changes. This self-service capability eliminates dependency on external testing equipment, reducing both cost and complexity while maintaining testing reliability.
2Reliability
If specialized test equipment and test environment are used, then pressure sensor testing can be performed, but testing cost increases and market share cannot be expanded
Solution Approach 1:
The integrated self-testing structure allows pressure sensors to test themselves without requiring expensive specialized equipment or controlled test environments. This dramatically reduces testing costs while maintaining adequate testing accuracy through the heating element and membrane layer combination.
Solution Approach 2:
The patent uses simple, inexpensive components (heating element and membrane layers) that can be easily fabricated as part of the standard sensor manufacturing process, replacing expensive reusable test equipment with cheap integrated testing structures.
3Measurement precision
If external pressure equipment is used for testing, then pressure detection can be achieved, but testing time increases and efficiency decreases
Solution Approach 1:
The patent combines the pressure generation (heating element) and pressure detection (membrane layers) functions within the same device structure, eliminating the need for external pressure equipment and sequential testing steps, thereby dramatically improving testing efficiency while maintaining pressure detection precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables cost-effective and efficient testing of wafer-level devices, reducing testing costs and time while improving efficiency, allowing for simpler and more economical testing processes.
Implementation Method 1
The electrical heating unit is configured on one membrane layer... The electrical heating unit heats up to increase the pressure in the cavity according to an input voltage
Implementation Method 2
The electrical heating unit heats up to increase the pressure in the cavity according to an input voltage, so that the membrane layers have a small deformation, and then the sensing circuit unit outputs a test signal according to the small deformation
Data Source
AI summary
A built-in self-test structure for a pressure tester and a method thereof are provided. The built-in self-test structure includes a substrate, a plurality of membrane layers, a fixing portion, an electrical heating unit and a sensing circuit unit. The membrane layers are formed on the substrate. The fixing portion is configured on the membrane layers and includes a notch. The notch and the membrane layers define a cavity. The electrical heating unit is configured on one membrane layer, and the sensing circuit unit is configured on another membrane layer. The electrical heating unit heats up to increase the pressure in the cavity according to an input voltage, so that the membrane layers have a small deformation. The sensing circuit unit outputs a test signal according to the small deformation.