Pre-Wet Nozzle Speed Control for Plating Throughput
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Solution Overview
Problem
The pre-wet process in plating apparatuses, which involves replacing air inside substrate patterns with a process liquid, prolongs processing time, negatively impacting throughput.
Innovation Solution
A method that calculates a maximum process time based on the rate-limiting step of the plating apparatus, determines a minimum nozzle head moving speed, and moves the nozzle head at or above this speed to supply pre-wet liquid efficiently, ensuring the pre-wet process does not hinder overall throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the pre-wet process time is increased to improve air replacement accuracy in substrate patterns, then the pre-wet effectiveness is improved, but the plating apparatus throughput is reduced
Solution Approach 1:
The nozzle head moves at a dynamically optimized speed that balances pre-wet effectiveness with throughput requirements. The control unit calculates and adjusts the moving speed based on process parameters, enabling the system to adapt between quality and speed requirements
Solution Approach 2:
The system changes the moving speed parameter of the nozzle head to optimize the pre-wet process. By adjusting this parameter within a calculated range, the system achieves effective air replacement while maintaining acceptable throughput levels
2Manufacturing precision
If the nozzle head moves slower to ensure adequate pre-wet liquid supply, then the pre-wet quality is improved, but the process time increases and throughput decreases
Solution Approach 1:
The control unit monitors process parameters and adjusts the nozzle head speed accordingly. This feedback mechanism ensures that the moving speed is optimized to achieve adequate liquid supply while minimizing process time and maintaining throughput
3Productivity
If the nozzle head moves faster to maintain throughput, then the productivity is maintained, but the pre-wet effectiveness is reduced
Solution Approach 1:
The system uses dynamic speed adjustment of the nozzle head, optimizing the balance between throughput and pre-wet quality. The control unit calculates appropriate speed ranges that maintain both productivity and effectiveness
Solution Approach 2:
The system preliminarily calculates the optimal moving speed range before executing the pre-wet process. This preliminary calculation ensures that the nozzle head moves at a speed that achieves both throughput and effective air replacement
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables effective pre-wet processing without reducing the plating apparatus' throughput by optimizing the nozzle head's movement speed and process time.
Implementation Method 1
The pre-wet process includes wetting a surface to be plated of the substrate before the plating process with a process liquid, such as pure water or deaerated water, to replace air inside a pattern formed on the surface of the substrate with the process liquid
Data Source
AI summary
Provided is a pre-wet process method by which a pre-wet process can be effectively performed on a substrate without affecting throughput. The pre-wet process method for performing the pre-wet process before performing a plating process on a substrate in a plating apparatus is provided. The pre-wet process method includes a step of calculating a maximum process time in a pre-wet module based on a rate limiting step of limiting a rate of a process in the whole plating apparatus, a step of calculating a minimum moving speed of the nozzle head in the pre-wet module based on the calculated maximum process time, and a step of moving the nozzle head at a speed equal to or more than the calculated minimum moving speed to supply a pre-wet liquid to the plate surface of the substrate.