Primary Server Database Indexing for Semiconductor Tool Clusters
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing semiconductor data management system is inefficient and costly due to the need for multiple full database management systems across multiple servers, requiring users to manually track and retrieve data files across complex networks, leading to time-consuming searches and high overhead costs.
Innovation Solution
A primary server architectural networking arrangement is implemented, where data is indexed and stored on secondary servers before being forwarded to a centralized primary server with a database management system, allowing for simplified data retrieval through a single interface and reducing the need for multiple database licenses and heavy-processing hardware.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple full database management systems are deployed across multiple servers, then data storage and retrieval capability is improved, but system complexity and overhead costs increase
Solution Approach 1:
The system divides database functionality into two segments: a lightweight indexing service deployed on each server that handles local data indexing, and a centralized database management system on the primary server that handles global data retrieval. This segmentation allows each component to be optimized independently, reducing overall system complexity while maintaining reliable data storage and retrieval across the distributed architecture.
2Reliability
If multiple full database management systems are deployed across multiple servers, then data storage and retrieval capability is improved, but overhead costs increase
Solution Approach 1:
The patent extracts the heavy database management system from individual servers and consolidates it onto a single primary server. Only lightweight indexing services remain on secondary servers, which significantly reduces software licensing costs, hardware requirements, and maintenance overhead while preserving the ability to store and retrieve data across the distributed system.
3Ease of operation
If users manually track and retrieve data files across complex networks, then data accessibility is maintained, but time consumption increases
Solution Approach 1:
The system performs preliminary indexing of all data files across the network before any retrieval operation occurs. The indexing service automatically creates and maintains an organized database of file locations, metadata, and relationships. When users need to retrieve data, they can query this pre-built index through a simple interface, eliminating the need to manually search through complex network paths and significantly reducing retrieval time.
Data Source
AI summary
An arrangement for performing at least one of collecting and analyzing data from a tool cluster configured to process a set of substrates is provided. The arrangement includes a plurality of tools from which at least one tool of the plurality of tools has a chamber for processing at least one of the set of substrates. The arrangement also includes a plurality of secondary servers configured to collect sensor data from the plurality of tools. The arrangement further includes a primary server communicably coupled with the plurality of secondary servers and configured to execute a database management system. The sensor data is indexed using a plurality of indexing applications on the plurality of secondary servers prior to being forwarded to the primary server for use by the database management system. Indexing includes associating a sensor data item with an identity of a server where the sensor data item is stored.