Printed TFT Array Substrate With Channel-Defined Semiconductor Patterning

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Solution Overview

Problem

The manufacturing processes of thin film transistors in existing display panels are complex, leading to high production costs and suboptimal comprehensive performance due to numerous deposition and etching steps, resulting in inconsistencies in film layers.

Innovation Solution

An array substrate with a semiconductor layer directly printed in a printing opening defined by a channel defining layer, where the semiconductor layer overlaps with the source and drain electrodes, and the channel defining layer is disposed around the semiconductor layer, simplifying the preparation process and reducing production costs by preventing ink overflow during printing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If multiple deposition and etching processes are used to prepare thin film transistors, then the film layers can be formed with desired structures, but the manufacturing process becomes complex and production costs increase

Engineering Contradiction:
Improvefilm layer consistencyVSAvoidmanufacturing process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent combines multiple separate deposition and etching processes into a single integrated printing process. The printing process directly forms the semiconductor layer with the desired pattern and structure in one step, eliminating the need for multiple sequential deposition and etching operations, thereby simplifying the manufacturing process while maintaining film layer consistency

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent replaces the mechanical/chemical processes of deposition and etching with a printing process. Instead of using complex deposition equipment and etching chemistry, the invention uses a printing mechanism to directly deposit and pattern the semiconductor material, significantly reducing process complexity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If multiple photomask processing steps are performed to form desired structures, then the thin film transistor structures can be precisely formed, but production costs increase and film consistency decreases due to processing deviations

Engineering Contradiction:
Improvestructure formation precisionVSAvoidmaterial waste and cost
Core Design Contradiction:
Manufacturing precisionVSLoss of substance

Solution Approach 1:

The patent extracts and eliminates the photomask processing steps from the manufacturing process. By using a printing process that directly patterns the semiconductor layer without requiring photomasks, the invention removes the source of processing deviations and material waste associated with multiple photomask steps

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent uses a printing process that creates a direct copy or replica of the desired semiconductor layer pattern. The printing process transfers the pattern directly onto the substrate with high precision, eliminating the need for iterative photomask processing and reducing both material waste and costs

Inventive Principle:
Principle #26Copying

3Reliability

If conventional thin film transistor manufacturing processes are used, then functional film layers can be formed, but the comprehensive performance of the array substrate is limited due to process complexity and inconsistencies

Engineering Contradiction:
Improvethin film transistor performanceVSAvoidproduction efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent performs preliminary action by directly printing the semiconductor layer with the final desired structure and pattern in one step. This preliminary formation of the complete semiconductor structure eliminates the need for subsequent processing steps, improving both production efficiency and device performance consistency

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent changes the fundamental process parameter from multiple sequential deposition and etching steps to a single printing process. This parameter change transforms the manufacturing approach, enabling higher productivity while maintaining or improving thin film transistor performance through more consistent film formation

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS20240222396A1Array substrate and manufacturing method thereof, and display panel
Publication Date: 2024.07.04 SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
  • US20240222396A1 patent drawing
  • US20240222396A1 patent drawing
  • US20240222396A1 patent drawing

AI summary

Embodiments of the present application provide an array substrate and a manufacturing method thereof, and a display panel. The array substrate includes a substrate, a source electrode, a drain electrode, a semiconductor layer, and a channel defining layer. The semiconductor layer is disposed between the source electrode and the drain electrode, and the semiconductor layer partially overlaps with the source electrode and the drain electrode. The channel defining layer is disposed around the semiconductor layer, and is correspondingly disposed on the source electrode and the drain electrode. When the semiconductor layer is prepared, the semiconductor layer is directly printed in a printing opening defined in the channel defining layer. Overflow of the semiconductor layer is prevented by the channel defining layer.