Printing Roll Pattern Transfer for LCD Thin Film Transistors
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Solution Overview
Problem
The existing methods for forming thin film transistors in LCD devices require multiple masks and processes, leading to increased manufacturing costs and prolonged process times, particularly due to the need for diffraction exposure and developing processes.
Innovation Solution
A method using printing rolls to form patterns with a step difference, eliminating the need for exposure and developing processes by transferring predetermined patterns onto a substrate, thereby reducing manufacturing costs and process steps.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If diffraction exposure and developing processes are used to form mask patterns, then pattern formation precision is improved, but manufacturing cost and process time increase
Solution Approach 1:
The invention extracts and eliminates the exposure and developing processes from the traditional photolithography sequence by using direct printing rolls to transfer patterns. This removes the time-consuming intermediate steps while maintaining pattern formation capability through a simplified mechanical transfer mechanism.
Solution Approach 2:
The invention uses printing rolls with pre-formed patterns that directly copy and transfer the desired mask pattern onto the substrate. This copying mechanism replaces the complex photochemical reproduction process, achieving pattern transfer without exposure and developing steps, thus reducing process time while maintaining precision.
2Manufacturing precision
If diffraction masks are used for pattern formation, then manufacturing precision is improved, but manufacturing cost increases
Solution Approach 1:
The invention replaces expensive, complex diffraction masks with simpler, lower-cost printing rolls that can be directly manufactured with the required patterns. The printing rolls serve as disposable or reusable tools that eliminate the need for costly mask fabrication and alignment infrastructure, significantly reducing manufacturing costs while maintaining pattern precision.
Solution Approach 2:
The invention substitutes the optical-mechanical diffraction mask system with a purely mechanical printing roll system. By using mechanically engraved or printed patterns on rotating rolls, the invention eliminates the need for complex optical alignment and diffraction physics, simplifying the manufacturing process and reducing equipment and material costs.
3Manufacturing precision
If multiple masks are used to form thin film transistor elements, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The invention merges multiple separate mask patterning operations into a single integrated printing roll process. By combining the gate electrode pattern, semiconductor layer pattern, and source/drain electrode pattern into one or more printing rolls that transfer all necessary patterns in a unified process, the invention reduces the number of discrete steps and equipment interventions, thereby reducing process complexity while maintaining the precision of individual element formation.
Data Source
AI summary
A method of forming a pattern having a step difference and a method of making a thin film transistor and an LCD device using the method of forming the pattern. The method of forming a pattern having a step difference includes forming a first pattern having a predetermined shape in a first printing roll, rotating the first printing roll on a substrate to transfer the first pattern onto the substrate, forming a second pattern having a predetermined shape in a second printing roll, and rotating the second printing roll on the substrate onto which the first pattern is transferred, to transfer the second pattern onto the substrate.