Priority Substrate Processing in Semiconductor Apparatus
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Solution Overview
Problem
Conventional liquid processing apparatuses face challenges in efficiently processing unscheduled or priority substrates without delaying normal operations or causing defects, as they often require stopping or delaying the processing of currently processed lots.
Innovation Solution
A substrate processing apparatus with a control unit that assigns priority processing units to handle urgent substrates in parallel with normal substrates, allowing for immediate processing of priority substrates without stopping or delaying the normal workflow by dynamically allocating processing units based on the number and priority of priority substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If the liquid processing for a currently processed lot is stopped to process a priority lot, then the priority substrates can be processed immediately, but the normal workflow is interrupted and defects may occur due to unusual operations
Solution Approach 1:
The processing units are segmented into priority processing units and normal processing units. The control unit dynamically assigns specific processing units to handle priority substrates separately from normal substrates, allowing simultaneous processing without interruption. This segmentation enables the priority lot to be processed immediately while the normal workflow continues uninterrupted in other units.
Solution Approach 2:
The control unit dynamically adjusts the assignment of processing units based on the presence of priority substrates. When priority substrates are detected, the control unit reassigns available processing units to handle them preferentially. This dynamic reassignment is temporary and automatic, allowing the system to adapt to urgent processing needs while maintaining normal operations, thereby preventing both delays and workflow interruptions.
2Reliability
If the liquid processing for a currently processed lot is waited upon to end before processing a priority lot, then the normal workflow remains stable, but the priority substrates experience significant processing delay
Solution Approach 1:
The system segments processing units into priority and normal categories, enabling parallel processing paths. Priority substrates are directed to assigned processing units that can begin processing immediately without waiting for normal lots to complete, thereby reducing processing delay while maintaining stability in normal workflow through separate unit assignments.
Solution Approach 2:
The control unit pre-assigns specific processing units to be available for priority substrates. When priority substrates arrive, these pre-designated units can immediately begin processing without requiring the normal workflow to pause or complete first. This preliminary assignment structure enables immediate processing action while preserving normal workflow continuity.
3Productivity
If processing units are dynamically assigned to priority substrates, then immediate processing is enabled without stopping normal operations, but the control system complexity increases
Solution Approach 1:
The control unit implements dynamic assignment of processing units to priority substrates based on real-time system state. This dynamic control enables high productivity for priority processing by automatically identifying and allocating available units, while the automated nature of the control logic prevents excessive complexity by using systematic rather than ad-hoc assignment rules.
Solution Approach 2:
The control unit continuously monitors the status of processing units and adjusts assignments based on feedback from the system state. This feedback mechanism enables efficient utilization of processing units for priority substrates while maintaining overall system productivity. The automated feedback-based control reduces the need for complex manual intervention, balancing productivity enhancement with manageable system complexity.
Data Source
AI summary
Disclosed are a substrate processing apparatus, a substrate processing method, and a storage medium, which can process a normal substrate according to a normal schedule in parallel with a substrate to be processed in preference to other substrates. Processing block performs the same types of processes for substrates, carried therein from FOUP placing unit, by using process arms. When a priority substrate having a priority over other substrates are carried, control unit carries and processes the priority substrate in priority processing unit that can receive a next substrate among priority processing units to which a plurality of processing units are partially or wholly assigned, in preference to other substrates.