Prism Beam Combiner for Wide-Angle Illumination

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Solution Overview

Problem

Conventional illuminators face challenges in achieving high radiant intensity and irradiance over large numerical apertures and fields, especially when the field's diagonal dimension is much larger than the working distance, and inserting a beamsplitter complicates meeting these design targets.

Innovation Solution

The design incorporates an extended radiation source with a controllable spatial distribution, condensing optics, and a prism combiner to achieve high uniformity and efficiency, allowing for a telecentric configuration that ensures uniform illumination across a large field with a numerical aperture exceeding 0.3, and includes a radiation source controller for precise control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a beamsplitter is inserted in the illumination path to enable imaging, then the imaging function is achieved, but the illumination uniformity and intensity distribution become difficult to control

Engineering Contradiction:
Improveimaging functionVSAvoidillumination uniformity
Core Design Contradiction:
Adaptability or versatilityVSIllumination intensity

Solution Approach 1:

The illumination system is segmented into multiple independent light sources (first light source for bright-field, second light source for dark-field) that can be controlled separately. This segmentation allows each source to be optimized for its specific function without interfering with the other, resolving the contradiction between achieving imaging versatility and maintaining illumination uniformity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A beam combiner is introduced as an intermediary component that merges the optical paths of multiple light sources while maintaining their individual characteristics. The beam combiner enables the beamsplitter to function for imaging while preserving the uniformity and intensity control of each illumination source through its specific optical design.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Area of stationary object

If the field diagonal dimension is made much larger than the working distance to expand the field of view, then the field coverage is improved, but the numerical aperture and illumination intensity decrease

Engineering Contradiction:
Improvefield of viewVSAvoidradiant intensity
Core Design Contradiction:
Area of stationary objectVSIllumination intensity

Solution Approach 1:

Multiple light beams are merged using a beam combiner to illuminate the same large field area simultaneously. By combining the radiant intensity from multiple sources, the system achieves both large field coverage and high illumination intensity, resolving the contradiction between field size and intensity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The illumination system is designed with multi-functional light sources that can provide both wide-field illumination and high numerical aperture illumination. The first light source provides uniform broad illumination for large fields, while the second light source provides concentrated illumination for high NA, allowing the system to achieve both objectives simultaneously.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If multiple light sources are used to provide both bright-field and dark-field illumination, then the versatility is improved, but the device complexity increases

Engineering Contradiction:
Improveillumination modesVSAvoidsystem structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The beam combiner serves as a universal optical component that handles multiple light sources and directs them through a single imaging path. This multi-functional design allows the system to achieve versatile illumination modes (bright-field, dark-field, and combinations) without proportionally increasing the complexity of the imaging system, as the beam combiner integrates multiple functions in one component.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables illumination with irradiance varying by no more than 10% across the field and received radiant intensity varying by no more than 20% across the numerical aperture, achieving high uniformity and wide field angles, suitable for applications requiring both bright-field and dark-field illumination.

Implementation Method 1

a first beam combiner reflecting the first and second light beams onto a common optical path

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a second beam combiner transmitting the first and second light beams along a common optical path

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS20240241358A1Multi-Modal Wide-Angle Illumination Employing a Compound Beam Combiner
Publication Date: 2024.07.18 ORBOTECH LTD
  • US20240241358A1 patent drawing
  • US20240241358A1 patent drawing
  • US20240241358A1 patent drawing

AI summary

Provided is an optical apparatus that includes an illumination assembly which include an extended radiation source emitting radiation with a controllable spatial distribution and telecentric condensing optics, configured to receive and project the emitted radiation with a numerical aperture exceeding 0.3 along a first optical axis onto a field and an imaging assembly that includes a sensor and objective optics configured to image the field along a second optical axis onto the sensor and also a prism combiner positioned between the field and the condensing and objective optics which is configured to combine the first and second optical axes, while reflecting at least one of the optical axes multiple times within the prism combiner.