Semiconductor Probe Cleaning via Pneumatic Air Blow
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Solution Overview
Problem
The frequent cleaning of probes with cleaning sheets during semiconductor wafer testing leads to reduced test accuracy and shortened probe life due to metal scrap adherence and wear.
Innovation Solution
A testing apparatus with a chamber, probe card, stage, and air tube system that uses dry air to blow off metal scrap from probes, and a scrap receiving member to collect the debris without physical contact, preventing probe wear and maintaining accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If cleaning sheets are used to clean probes periodically, then metal scrap is removed from probes, but probe wear increases and probe life is shortened
Solution Approach 1:
The patent replaces the mechanical cleaning system (cleaning sheets physically contacting probes) with a pneumatic system that uses airflow to remove metal scrap. The air tube delivers compressed air to the probe tip, creating a flow that carries away debris without mechanical contact, thus eliminating wear while maintaining cleaning effectiveness
Solution Approach 2:
The patent employs pneumatic principles by introducing compressed air through an air tube to the probe tip. The high-velocity air stream creates a pneumatic conveyor effect that lifts and transports metal scrap away from the probe, replacing mechanical cleaning with a contactless pneumatic process
2Reliability
If cleaning sheets are used to clean probes frequently, then metal scrap is removed from probes, but the frequency of cleaning operations increases time loss
Solution Approach 1:
The patent enables continuous or near-continuous cleaning capability by keeping the air tube connected and pressurized throughout testing operations. Metal scrap can be removed on-demand without stopping the testing process, transforming cleaning from a periodic batch operation to a continuous maintenance function that eliminates downtime
3Reliability
If cleaning sheets are used to clean probes, then metal scrap is removed from probes, but the complexity of the cleaning system increases
Solution Approach 1:
The patent extracts the cleaning function from the complex mechanical cleaning sheet system and implements it through a simple pneumatic delivery system. The air tube and compressed air source replace multiple moving parts, sheets, and mechanical components with a single pneumatic pathway, reducing overall system complexity while achieving the same cleaning objective
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively removes metal scrap from probes without using cleaning sheets, thereby maintaining test accuracy and extending the life of the probes by avoiding wear during the cleaning process.
Implementation Method 1
an air tube introducing first dry air into the chamber through the probe card when the stage is placed at the cleaning position
Data Source
AI summary
A testing apparatus according to an embodiment includes a chamber, a probe card including probes exposed in the chamber, a stage supporting a test target object in the chamber, a moving mechanism to move the stage between a testing position where the test target object is in contact with the probes and a cleaning position where the test target object is arranged away from the probes in a horizontal direction, and an air tube introducing first dry air into the chamber through the probe card when the stage is placed at the cleaning position.