Probe Apparatus Linear Loader Vertical Transfer
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Solution Overview
Problem
Current probe apparatuses face challenges in improving throughput, reducing footprint, and maintaining a clean atmosphere within the prober chamber, particularly in configurations with multiple prober chambers and a substrate transfer mechanism that moves in left and right directions.
Innovation Solution
The probe apparatus is designed with a loader chamber and a substrate transfer mechanism that lowers and moves a test target substrate in front of a row of prober chambers in parallel, allowing efficient transfer and measurement of electrical characteristics, while an angular or rounded loading/unloading port and shutter member ensure a clean and sealed environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the substrate transfer mechanism moves in left and right directions in front of multiple prober chambers, then the apparatus can service multiple prober chambers, but the moving distance increases and throughput decreases
Solution Approach 1:
The substrate transfer mechanism is configured to move in the vertical direction (up and down) instead of only in the horizontal direction (left and right). By lowering the mechanism to a loading/unloading port positioned between adjacent prober chambers, substrates can be transferred to multiple prober chambers from a single vertical position, reducing the horizontal moving distance and increasing throughput while maintaining the ability to service multiple chambers
2Adaptability or versatility
If the substrate transfer mechanism moves in left and right directions to transfer substrates, then multiple prober chambers can be serviced, but the footprint of the apparatus increases
Solution Approach 1:
The loading/unloading port is positioned vertically between adjacent prober chambers rather than horizontally at the front of each chamber. This vertical positioning allows the substrate transfer mechanism to access multiple prober chambers from a compact horizontal footprint, reducing the overall apparatus width while maintaining multi-chamber capability
3Ease of operation
If the prober chamber is open for substrate transfer, then substrates can be loaded and unloaded, but the clean atmosphere inside the prober chamber deteriorates
Solution Approach 1:
A shutter member is installed at the loading/unloading port to seal the opening when not in use. The shutter can be opened to allow substrate transfer and closed to maintain the clean atmosphere inside the prober chamber, preventing contamination from the external environment while enabling operational access
Data Source
AI summary
A probe apparatus includes a plurality of prober chamber arranged in a straight line; and a loader chamber having a substrate transfer mechanism that takes out a test target substrate from a container provided in an upper area of the prober chamber, lowers the test target substrate to a height corresponding to a loading/unloading port of the prober chamber, moves in front of a row of the prober chambers in parallel to the row of the prober chambers and transfers the test target substrate into the prober chamber. A reading mechanism for reading information recorded on the test target substrate held on the substrate transfer mechanism is installed at a horizontal moving mechanism that moves the substrate transfer mechanism in front of the row of the prober chambers in parallel to the row of the prober chambers.