Probe Arrays with Spatially Varying Material Properties
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Solution Overview
Problem
As the pitch requirements of probing applications become more demanding, achieving the required contact force without exceeding the yield stress of the material used becomes increasingly challenging, necessitating methods for creating probe arrays with tailored control of material properties.
Innovation Solution
The development of a method for forming probe arrays using multi-photon lithography to pattern plating template materials, allowing for variations in material properties along the length of probes, enabling the creation of probes with specific mechanical properties such as elastic modulus and yield strength, and incorporating guide plates with laterally shifted holes to accommodate these variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If tighter pitch arrays are formed with uniform material properties, then manufacturing precision is improved, but the ability to meet contact force requirements without exceeding yield stress deteriorates
Solution Approach 1:
The patent applies local quality by varying material properties along the longitudinal length of probe elements. Different sections of the probe have different material compositions or structures, allowing the tip region to have optimized mechanical properties for contact force while maintaining overall array precision. This enables tailored control of material properties at specific locations within the probe structure.
Solution Approach 2:
The patent implements parameter changes by modifying material properties (such as elastic modulus, yield strength, or composition) along the length of probe elements. This allows the probe to have different mechanical characteristics in different regions, enabling the tip to achieve required contact force while the base maintains structural integrity, thus resolving the contradiction between pitch precision and contact reliability.
2Ease of manufacture
If material properties are uniformly controlled throughout probe elements, then ease of manufacture is improved, but adaptability to different contact force requirements deteriorates
Solution Approach 1:
The patent uses local quality to create probes with spatially varying material properties. By implementing gradients or discrete variations in material composition along the probe length, the manufacturing process can produce probes adapted to specific contact force requirements while maintaining relatively simple fabrication procedures. The variation is achieved through controlled changes in deposition parameters or material mixing during the manufacturing process.
Solution Approach 2:
The patent employs composite materials or material composites to achieve varied mechanical properties within probe elements. By combining different materials or creating material gradients along the probe length, the invention enables tailored mechanical properties for different applications while using established manufacturing techniques for depositing multiple material layers or compositions.
3Strength
If probe elements are made with higher strength materials, then strength is improved, but the ability to achieve required contact force without exceeding yield stress deteriorates
Solution Approach 1:
The patent applies local quality by creating probes with non-uniform material properties along their length. The probe tip or contact region has material properties optimized for achieving required contact force, while other regions have higher strength materials for structural support. This spatial variation in material properties allows the probe to generate sufficient contact force without any section exceeding its yield stress.
Solution Approach 2:
The patent uses segmentation to divide the probe into distinct regions with different material properties. By segmenting the probe structure into a contact region, intermediate region, and base region, each can be optimized independently - the contact region for force application and other regions for strength - thereby achieving contact force requirements without exceeding yield stress in any segment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the formation of probe arrays that can meet contact force and overtravel requirements without exceeding material limitations, allowing for tighter pitch arrays with enhanced mechanical and electrical properties.
Implementation Method 1
The development of a method for forming probe arrays using multi-photon lithography to pattern plating template materials
Implementation Method 2
providing a structural material into the plurality of openings to form at least a portion of a plurality of probes
Data Source
AI summary
Probe structures, probe arrays, have varying intrinsic material properties along their lengths. Methods of forming probes and probe arrays comprise varying the plating parameters to provide varying intrinsic material properties. Some embodiments provide deposition templates created using multiphoton lithography to provide probes with varying lateral configurations along at least portion of their lengths.